OEMs / Semiconductor Machinery Manufacturing / PVATePla AG

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Listing ID	280996 Upgrade Report
URL	http://www.pvatepla.com
Company	PVATePla AG
Description	The company produces plasma systems for applications in wafer cleaning and chip packaging processes, like photoresist removal, wafer and lead frame cleaning for production of microchips, MEMS, Flat Panel Displays and solar cells; also laser-based metrology systems for wafer defect measurement and implant dose monitoring. PVATePla AGs plasma division is headquartered in Feldkirchen near Munich, Germany. The american subsidiary in Corona, CA focuses on plasma surface cleaning and activation for industrial and medical applications.
Category	OEMs / Semiconductor Machinery Manufacturing
Contact	Petra Meinken
Email	Send an inquiry
Tag	plasma ashing, resist stripping, plasma cleaning, microwave plasma
Phone	+49 89 905030
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Country	Germany
Date Added	April 27, 2005
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