Atomic Layer Deposition

Price:

USD $4,850.00

ISBN/SKU #:

GB-SMC061B

Research Group:

BCC

Date of Publication:

January 2010

Summary

The main goal of this report is to provide new insights into current ALD technology, outlining technological trends, and supplying an updated market analysis for ALD materials and equipment.

Specifically, the major objectives of this study are:

Provide an updated review of ALD technology, focusing on materials, equipment, and fabrication technologies
Highlight new technological developments during the past 3 years, while outlining current technical issues
Review existing fields of application for atomic layer deposition and investigate emerging applications
Estimate current global markets for ALD materials and equipment with growth forecasts through 2014 for each market segment
Identify important technology and market trends within each market segment
Supply an updated review of current players in ALD technology
Provide a description of current worldwide research activities and evaluate their impact on industry growth
Determine trends in U.S. patents issued during the past 3 years.

Atomic layer deposition is a thin film deposition method that allows for the manufacturing of films by sequential deposition of layers at an atomic scale. This technique has been investigated for producing nanofilms for various commercial sectors, including but not limited to electronics, mechanical/chemical, energy, optics, and medical/biological. In 2005, the ALD market was quite small, valued at $214.1 million, and growing at a healthy 18.8% compound annual growth rate (CAGR) during the period 2003 through 2005. ALD technology has continued to evolve. Modified processes have been introduced to mitigate some intrinsic drawbacks of ALD technology and to expand its fields of application. The principal reason for doing this study is to present a current assessment of the ALD industry from both a technological and market point of view and to outline future trends and key developments.

There is also a need to evaluate the current status and future trends of the ALD industry from a global standpoint. The market for atomic layer deposition is still quite small, with a very limited number of players; consequently, any change in a firm’s activities and/or location has a major impact on both manufacturing and sales distribution. Therefore, it is also necessary to provide an updated geographical mapping of points of production of ALD materials and equipment, relative to global sales and distribution. Such an evaluation will contribute to a broader understanding of growth opportunities for ALD technology and its applications within the U.S. and abroad.

An equally important reason for performing this study is to provide an overview of global R&D activities related to the ALD industry, both within public and private organizations, and to illustrate the latest technological developments that can assist companies in finding opportunities for process and productivity improvements and, consequently, positively impact their future market growth.

This study will be of primary interest to all companies that:

Manufacture, sell, and distribute ALD materials and equipment
Fabricate thin film devices or coated products.
Offer thin film deposition and coating services
Manufacture processing and characterization equipment for the thin film industry
Provide technical and/or marketing services for the thin film industry
Are planning to enter the thin film industry and nanotechnology sector as a supplier, manufacturer, service provider, or end user.

Overall, this study applies to industry segments such as electronics, mechanical, chemical, energy, optics, medical, biological, dental, medical, and nanotechnology. The study is mainly directed towards executives, directors, operations managers, sales and marketing managers, and strategic planners working within the above industries. Universities and research facilities may find this study to be a good source of technical information regarding ALD technology, materials, and equipment, which can be used as a baseline for new or expanded R&D activities. Librarians of technical information and research centers can also use this report to provide critical data to product managers, market analysts, researchers, and other professionals needing detailed and updated insights into the ALD industry.

This study provides an updated review of the atomic layer deposition process, with its variants and upgrades, focusing on materials and equipment used. A detailed description of current and emerging applications of ALD technology is also supplied. This research report describes various types of precursors and production systems, determines their current market status, defines trends, and presents forecasts of growth over the next 5 years. Technological issues, including the latest process developments, are also discussed. The research analyzes the ALD industry on a worldwide basis from the standpoint of both manufacturing and consumption. In addition, the study examines commercial and public research activities in major regions of the world. Research objectives and areas of interest related to the ALD process, materials, equipment, and applications are also outlined.

More specifically, market analysis is divided into five parts.

In the first part, a historical review of the atomic layer deposition process is provided, including an outline of recent events. In this section, current and emerging applications of ALD are also identified and divided by sector (i.e., electronics, mechanical/chemical, energy, optics, medical/biological/dental, and nanotechnology).
The second part of the report entails a global market analysis of the ALD industry, based on two product categories: ALD precursors and equipment. This section offers a revised and detailed description of ALD materials, followed by a review of related recent technological developments and patent abstracts. Global materials revenues (sales data in M$) are presented for each type of material, and by application and region, with actual data referring to the years 2005 through 2008, and estimated data for the year 2009. Additionally, an updated review of process technologies and equipment is provided, together with a discussion of new features and improvements and significant patents. To characterize the current ALD equipment market, global revenues are reported for the period 2005 through 2009 with current estimates by equipment type, application, and region. This section is completed by a presentation of market growth trends, based on industry growth, technological trends, equipment upgrades, and regional trends. Projected revenues for both materials and systems are reported, with forecast CAGRs for the period 2009 through 2014.
In the third part, covering global industry structure, the report provides a complete list of manufacturers of ALD materials and equipment with a description of their products. The analysis includes a description of the geographical distribution of these firms and an evaluation of ALD precursors and equipment production versus consumption, always from a geographical standpoint. Detailed company profiles of the top 25 industry players and individual market shares for the five leading companies are also provided.
In the fourth part of this study, an analysis of industry competitiveness is performed. This analysis encompasses a review of global research and development activities, with profiles of the most important R&D players divided by region, and an outline of the most critical factors contributing to industry competitiveness.
The fifth and final section includes an extensive U.S. patent analysis, with a summary of patents related to ALD materials, equipment, processes, and applications, issued during the period 2007 through 2009. Patent analysis is performed by region, country, assignee, patent category, application, and film type.

This Report:

Provides information on the basic atomic layer deposition (ALD) process, with its variants and upgrades, focusing on raw materials and equipment used
Identifies various types of precursors and production systems, determines their current market status, defines trends, and presents forecasts of growth, with data for 2008, estimates for 2009, and compound annual growth rates (CAGRs) through 2014
Discusses technological issues, including the latest process developments, and compares them with alternative thin film methods
Analyzes the ALD industry on a worldwide basis from the standpoint of both manufacturing and consumption
Supplies a detailed description of current and potential applications of ALD technology
Examines commercial and public research activities in major regions of the world.

TABLE OF CONTENTS

Chapter- 1: INTRODUCTION

STUDY GOALS AND OBJECTIVES	1
REASONS FOR DOING THIS STUDY	2
INTENDED AUDIENCE	2
SCOPE OF REPORT	3
METHODOLOGY AND INFORMATION SOURCES	4
RELATED RESEARCH STUDIES	5
ANALYST CREDENTIALS	6
DISCLAIMER	7

Chapter-2: EXECUTIVE SUMMARY

EXECUTIVE SUMMARY	8
SUMMARY TABLE GLOBAL ATOMIC LAYER DEPOSITION MARKET, THROUGH 2014 ($ MILLIONS)	9
SUMMARY FIGURE GLOBAL ATOMIC LAYER DEPOSITION MARKET, 2005-2014 ($ MILLIONS)	10

Chapter-3: OVERVIEW

INTRODUCTION	11
THIN FILMS, NANOFILMS, AND ALD FILMS	11
TABLE 1 THIN FILM TECHNOLOGIES, 2009	12
FIGURE 1 THIN FILM METHODS (EQUIPMENT, MATERIALS, AND SERVICES): GLOBAL MARKET SHARE BY GROUP OF TECHNOLOGIES, 2008 (%)	15
REVIEW OF THE HISTORY OF ATOMIC LAYER DEPOSITION AND RECENT EVENTS	15
TABLE 2 ATOMIC LAYER DEPOSITION-TECHNOLOGICAL MILESTONES	16
FIGURE 2 ATOMIC LAYER DEPOSITION-WORLDWIDE PATENT APPLICATIONS AND PATENTS ISSUED, 1990-2008	17
CURRENT AND EMERGING APPLICATIONS FOR ATOMIC LAYER DEPOSITION	17
TABLE 3 ALD FILMS AND APPLICATIONS, 2009	18
ELECTRONICS	22
Established Applications	22
Semiconductor Devices	22
Passive Components and Embedded Devices	22
Recording Heads	22
Optoelectronic Devices	22
Advanced Displays	23
Emerging Applications	23
TABLE 4 ALD APPLICATIONS IN ELECTRONICS, 2009	24
MECHANICAL/CHEMICAL	25
Established Applications	25
Wear and Corrosion Resistant Coatings	25
MEMS and MOEMS	25
Sensors	25
Particle Coatings	25
Catalysts and Membranes	26
Emerging Applications	26
TABLE 5 ALD APPLICATIONS IN THE MECHANICAL/CHEMICAL SECTOR, 2009	26
ENERGY	27
Established Applications	27
Photovoltaic Cells and Photothermal Coatings	27
High Temperature Superconductors	27
Solid Oxide Fuel Cells	28
Batteries	28
Emerging Applications	28
TABLE 6 ALD APPLICATIONS IN THE ENERGY SECTOR, 2009	28
OPTICS	29
Established Applications	29
Optical Coatings	29
X-ray Diffraction Devices	29
Emerging Applications	29
TABLE 7 ALD APPLICATIONS IN OPTICS, 2009	30
MEDICAL/BIOLOGICAL/DENTAL	30
Established Applications	30
Biocompatible Coatings	30
Emerging Applications	30
TABLE 8 ALD APPLICATIONS IN THE MEDICAL/BIOLOGICAL/DENTAL SECTOR, 2009	31
NANOTECHNOLOGY	31
Established Applications	31
Nanoparticles	31
Nanowires	31
Nanotubes	31
Nanolaminates and Nanocomposites	32
Emerging Applications	32
TABLE 9 ALD APPLICATIONS IN NANOTECHNOLOGY, 2009	32

Chapter-4: GLOBAL MARKET

ALD MATERIALS AND EQUIPMENT-ANALYSIS OUTLINE	33
GLOBAL MARKET SUMMARY	33
TABLE 10 GLOBAL ATOMIC LAYER DEPOSITION MARKET, 2005 THROUGH 2014 ($ MILLIONS)	35
FIGURE 3 GLOBAL ATOMIC LAYER DEPOSITION MARKET, 2005-2014 ($ MILLIONS)	35
ALD MATERIALS	36
INTRODUCTION	36
METAL SOURCES	36
TABLE 11 METAL SOURCES, 2009	36
Earlier Metal Precursors	37
Current Technical Issues	38
Latest Technological Developments, 2006 to Present	39
Metal Beta-Ketoiminate and Beta-Diiminate Complexes	39
Diimine Copper Complexes	39
Precursors Containing Electron Donating Group-Substituted Alkenyl Ligands	40
Phosphoamidinate Precursors	40
Organometallic Precursors for High-Purity Metal Films	41
FUNCTIONAL GROUP SOURCES	41
Elemental Films Using Boron Compounds	42
INERT GASES	42
CURRENT MARKET STATUS	42
Current Market Summary	42
TABLE 12 GLOBAL MARKET FOR ALD MATERIALS, THROUGH 2009 ($ MILLIONS)	43
Revenues by Material Type	43
TABLE 13 ALD MATERIALS: GLOBAL REVENUES BY PRECURSOR TYPE, 2009 ($ MILLIONS/%)	44
TABLE 14 ALD MATERIALS: GLOBAL REVENUES BY FILM TYPE, 2009 ($ MILLIONS/%)	45
FIGURE 4 ALD MATERIALS: MARKET SHARE BY FILM TYPE, 2009 (%)	45
Revenues by Application	45
TABLE 15 ALD MATERIALS: GLOBAL REVENUES BY APPLICATION, 2009 ($ MILLIONS/%)	46
FIGURE 5 ALD MATERIALS: MARKET SHARE BY APPLICATION, 2009 (%)	46
TABLE 16 ALD PRECURSORS FOR SEMICONDUCTOR DEVICES: GLOBAL REVENUES BY FUNCTION, 2009 ($ MILLIONS/%)	47
Revenues by Region	47
TABLE 17 ALD MATERIALS: REVENUES BY REGION, THROUGH 2009 ($ MILLIONS)	48
FIGURE 6 ALD MATERIALS: MARKET SHARE BY REGION, 2009 (%)	49
ALD EQUIPMENT AND TECHNOLOGIES	49
EXISTING TECHNOLOGIES	49
TABLE 18 ALD TECHNOLOGIES	50
LATEST TECHNOLOGICAL DEVELOPMENTS, 2006 TO PRESENT	51
Rapid Vapor Deposition ALD	51
Variable Temperature and Dose Atomic Layer Deposition	51
Microwave-aided ALD	52
Hybrid Chemical Vapor Deposition	53
Field-aided Preferential Deposition	53
CURRENT MARKET STATUS	54
Current Market Summary	54
TABLE 19 GLOBAL MARKET FOR ALD EQUIPMENT, THROUGH 2009 ($ MILLIONS)	55
Revenues by Equipment Type	55
TABLE 20 ALD EQUIPMENT: GLOBAL REVENUES BY TYPE, 2009 ($ MILLIONS/%)	56
FIGURE 7 ALD EQUIPMENT: MARKET SHARE BY TYPE, 2009 (%)	57
Revenues by Application	57
TABLE 21 ALD EQUIPMENT: GLOBAL REVENUES BY APPLICATION, 2009 ($ MILLIONS/%)	58
FIGURE 8 ALD EQUIPMENT: MARKET SHARE BY APPLICATION, 2009 (%)	58
Revenues by Region	58
TABLE 22 ALD EQUIPMENT: REVENUES BY REGION, THROUGH 2009 ($ MILLIONS)	59
FIGURE 9 ALD EQUIPMENT: MARKET SHARE BY REGION, 2009 (%)	59
MARKET GROWTH TRENDS	60
INDUSTRY GROWTH AND TECHNOLOGICAL TRENDS	60
Semiconductor Devices	60
Industry Growth	60
TABLE 23 FORECAST-SEMICONDUCTORS: REVENUES BY REGION, THROUGH 2014 ($ BILLIONS)	61
Technological Trends	61
TABLE 24 IC CONFIGURATIONS, 2006-2015	61
Magnetic Recording Media	62
Industry Growth	62
TABLE 25 FORECAST-HARD DISK DRIVES: GLOBAL PRODUCTION BY TYPE, THROUGH 2014 (MILLION UNITS)	63
FIGURE 10 FORECAST-HARD DISK DRIVES: PRODUCTION SHARE BY TYPE, 2014 (%)	63
TABLE 26 FORECAST-HARD DISKS: GLOBAL PRODUCTION BY TYPE, THROUGH 2014 (MILLION UNITS)	64
FIGURE 11 FORECAST-HARD DISKS: GLOBAL PRODUCTION BY TYPE, 2009 AND 2014 (MILLION UNITS)	64
FIGURE 12 FORECAST-HARD DISKS: PRODUCTION SHARE BY TYPE, 2014 (%)	65
Technological Trends	65
Advanced Displays	66
Industry Growth	66
TABLE 27 FORECAST-ADVANCED DISPLAYS: GLOBAL REVENUES BY TYPE, THROUGH 2014 ($ BILLIONS)	66
Technological Trends	67
New Films	67
Roll-to-roll and Large Area Coatings	67
Other Applications	68
EQUIPMENT UPGRADES	69
NANOTECHNOLOGY AND OTHER TECHNOLOGICAL FACTORS	69
Nanotechnology	69
TABLE 28 THE NANOTECHNOLOGY INDUSTRY	70
TABLE 29 NANOTECHNOLOGY: GLOBAL REVENUES BY SEGMENT, THROUGH 2014 ($ BILLIONS)	71
Comparison with Alternative Technologies	71
TABLE 30 DEPOSITION METHODS FOR NANOFILMS	71
New Product Development	72
New Generation of Composite Materials	73
REGIONAL TRENDS	73
PROJECTED ATOMIC LAYER DEPOSITION MARKET	74
KEY OBSERVATIONS	74
TABLE 31 FACTORS AFFECTING SALES OF ALD PRECURSORS AND EQUIPMENT, 2010-2014	74
ALD MATERIALS MARKET FORECAST	75
Revenues by Material Type	75
TABLE 32 FORECAST-ALD MATERIALS: GLOBAL REVENUES BY PRECURSOR TYPE, THROUGH 2014 ($ MILLIONS)	76
TABLE 33 FORECAST-ALD MATERIALS: GLOBAL REVENUES BY FILM TYPE, THROUGH 2014 ($ MILLIONS)	77
FIGURE 13 FORECAST-ALD MATERIALS: MARKET SHARE BY FILM TYPE, 2014 (%)	77
Revenues by Application	78
TABLE 34 FORECAST-ALD MATERIALS: GLOBAL REVENUES BY APPLICATION, THROUGH 2014 ($ MILLIONS)	79
FIGURE 14 FORECAST-ALD MATERIALS: MARKET SHARE BY APPLICATION, 2014 (%)	79
TABLE 35 FORECAST-ALD PRECURSORS FOR SEMICONDUCTOR DEVICES: GLOBAL REVENUES BY FUNCTION, THROUGH 2014 ($ MILLIONS)	80
Revenues by Region	80
TABLE 36 FORECAST-ALD MATERIALS: REVENUES BY REGION, THROUGH 2014 ($ MILLIONS)	81
FIGURE 15 FORECAST-ALD MATERIALS: MARKET SHARE BY REGION, 2014 (%)	82
ALD EQUIPMENT MARKET FORECAST	82
Revenues by Equipment Type	82
TABLE 37 FORECAST-ALD EQUIPMENT: GLOBAL REVENUES BY TYPE, THROUGH 2014 ($ MILLIONS)	83
FIGURE 16 FORECAST-ALD EQUIPMENT: MARKET SHARE BY TYPE, 2014 (%)	84
Revenues by Application	84
TABLE 38 FORECAST-ALD EQUIPMENT: GLOBAL REVENUES BY APPLICATION, THROUGH 2014 ($ MILLIONS)	85
FIGURE 17 FORECAST-ALD EQUIPMENT: MARKET SHARE BY APPLICATION, 2014 (%)	85
Revenues by Region	86
TABLE 39 FORECAST-ALD EQUIPMENT: REVENUES BY REGION, THROUGH 2014 ($ MILLIONS)	86
FIGURE 18 FORECAST-ALD EQUIPMENT: MARKET SHARE BY REGION, 2014 (%)	87

Chapter-5: GLOBAL INDUSTRY STRUCTURE

GLOBAL INDUSTRY STRUCTURE	88
MANUFACTURERS OF ALD MATERIALS AND EQUIPMENT	89
TABLE 40 MANUFACTURERS OF ALD MATERIALS AND EQUIPMENT	89
FIGURE 19 ALD MANUFACTURERS: DISTRIBUTION BY SIZE, 2009 (NUMBER OF COMPANIES)	91
TABLE 41 ALD MANUFACTURERS: DISTRIBUTION BY REGION, 2005 AND 2009 (NUMBER OF COMPANIES)	92
TABLE 42 NOTABLE INDUSTRY CHANGES SINCE 2005	92
OTHER PLAYERS IN THE ALD INDUSTRY	93
TABLE 43 OTHER RELEVANT INDUSTRY PLAYERS	93
ATOMIC LAYER DEPOSITION PRODUCTION BY REGION	93
TABLE 44 ALD PRODUCTION BY REGION, 2007-2014 (PERCENT OF SALES)	94
ATOMIC LAYER DEPOSITION CONSUMPTION BY REGION	94
TABLE 45 ALD CONSUMPTION BY REGION, 2007-2014 (PERCENT OF SALES)	95
COMPANY PROFILES	95
ADEKA	96
AIR LIQUIDE	96
AIR PRODUCTS AND CHEMICALS	97
AIXTRON	98
AKZO NOBEL	99
APPLIED MATERIALS	99
ASM INTERNATIONAL	100
ATMI	102
BENEQ	102
CAMBRIDGE NANOTECH	104
H. C. STARCK	105
HITACHI KOKUSAI ELECTRIC	105
INTEGRATED PROCESS SYSTEMS	106
JOHNSON MATTHEY	107
JUSUNG ENGINEERING	107
KURT J. LESKER	108
LINDE	109
NOVELLUS SYSTEMS	110
OXFORD INSTRUMENTS	111
PICOSUN	112
PRAXAIR	113
ROHM AND HAAS	114
SHIN-ETSU CHEMICAL	115
SIGMA-ALDRICH	115
TEGAL	117
TOP PLAYERS MARKET SHARE	117
FIGURE 20 ATOMIC LAYER DEPOSITION-TOP 25 MANUFACTURERS BY REGION, 2009 (%)	118
TABLE 46 ALD MATERIALS-MARKET SHARE OF TOP FIVE MANUFACTURERS, 2009 (PERCENT OF TOTAL SALES)	119
TABLE 47 ALD EQUIPMENT-MARKET SHARE OF TOP FIVE MANUFACTURERS, 2009 (PERCENT OF TOTAL SALES)	119

Chapter-6: INDUSTRY COMPETITIVENESS

ALD DEVELOPMENT ACTIVITIES	120
TABLE 48 ORGANIZATIONS INVOLVED IN ALD RESEARCH, WORLDWIDE	120
UNITED STATES	124
Albany Nanotech	124
TABLE 49 ALBANY NANOTECH RESEARCH	125
Argonne National Laboratory	125
TABLE 50 ARGONNE NATIONAL LABORATORY RESEARCH	126
Harvard University	126
TABLE 51 HARVARD UNIVERSITY RESEARCH	127
Stanford University	127
TABLE 52 STANFORD UNIVERSITY RESEARCH	128
SVTC Technologies	128
University of California, Los Angeles	129
TABLE 53 UCLA RESEARCH	130
University of Colorado at Boulder	130
TABLE 54 UNIVERSITY OF COLORADO AT BOULDER RESEARCH	131
EUROPE	131
Eindhoven University of Technology	131
TABLE 55 EINDHOVEN UNIVERSITY OF TECHNOLOGY RESEARCH	132
Helsinki University of Technology	132
TABLE 56 TKK RESEARCH	133
IMEC	133
TABLE 57 IMEC RESEARCH	134
University of Helsinki	134
TABLE 58 UNIVERSITY OF HELSINKI RESEARCH	135
ASIA PACIFIC	135
Korea Advanced Institute of Science and Technology	135
TABLE 59 KAIST RESEARCH	136
Semiconductor Leading Edge Technologies	136
SUMMARY OF GLOBAL R&D ACTIVITIES IN ALD TECHNOLOGY	136
FIGURE 21 CURRENT GLOBAL ALD RESEARCH AND DEVELOPMENT BY SUBJECT (%)	138
OTHER CONSIDERATIONS	138
KEY GROWTH MARKETS	139
TABLE 60 GLOBAL GROWTH FORECAST FOR CURRENT AND POTENTIAL ALD APPLICATIONS, 2009-2014	139
DRIVING FORCES AND THEIR IMPACT ON MARKET GROWTH	140
TABLE 61 PERCENTAGE IMPACT OF MAJOR COMPETITIVE FACTORS ON THE GROWTH OF THE ALD MARKET, 2009-2014	141

Chapter-7: U.S. PATENT ANALYSIS

INTRODUCTION	142
SUMMARY OF PATENTS AWARDED DURING THE PERIOD 2007 THROUGH 2009	142
TABLE 62 ATOMIC LAYER DEPOSITION-U.S. PATENTS, 2009	143
TABLE 63 ATOMIC LAYER DEPOSITION-U.S. PATENTS, 2008	159
TABLE 64 ATOMIC LAYER DEPOSITION-U.S. PATENTS, 2007	173
GENERAL TRENDS	184
TABLE 65 ATOMIC LAYER DEPOSITION: U.S. PATENT TRENDS, 2003-2009	185
FIGURE 22 ATOMIC LAYER DEPOSITION: U.S. PATENT TRENDS, 2003-2009 (NUMBER OF PATENTS)	185
TRENDS BY COUNTRY AND REGION	186
FIGURE 23 SHARES OF U.S. PATENTS RELATED TO ATOMIC LAYER DEPOSITION BY REGION, 2007-2009 (%)	186
FIGURE 24 ATOMIC LAYER DEPOSITION: PATENTS BY COUNTRY, 2007-2009 (%)	187
FIGURE 25 ATOMIC LAYER DEPOSITION: PATENTS BY COUNTRY, 2003-2005 (NUMBER OF PATENTS)	189
TRENDS BY ASSIGNEE	189
TABLE 66 ASSIGNEES OF U.S. PATENTS RELATED TO ATOMIC LAYER DEPOSITION, 2007-2009	191
FIGURE 26 ATOMIC LAYER DEPOSITION: SHARES OF U.S. PATENTS BY ORGANIZATION TYPE, 2007-2009 (%)	194
TRENDS BY PATENT CATEGORY	194
FIGURE 27 ATOMIC LAYER DEPOSITION: SHARES OF U.S. PATENTS BY CATEGORY, 2007-2009 (%)	195
TRENDS BY APPLICATION	196
FIGURE 28 ATOMIC LAYER DEPOSITION: SHARES OF U.S. PATENTS BY APPLICATION, 2007-2009 (%)	197
TRENDS BY FILM TYPE	197
FIGURE 29 ATOMIC LAYER DEPOSITON: SHARES OF U.S. PATENTS BY FILM TYPE, 2007-2009 (%)