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Dielectrics and Substrates in Semiconductors: Technologies and Global Markets

Price:
USD $4,850.00
ISBN/SKU #:
GB-SMC040C
Research Group:
BCC
Date of Publication:
November 2009
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Summary

Dielectrics and substrates are the two entities in which the sophistication of software-based circuit design meets the plain reality of hardware properties and limitations. For years, silicon and its derivatives have admirably handled dual roles, allowing unprecedented advances in hardware features in areas such as speed of operations, form factor, and power consumption in addition to setting and maintaining a trail-blazing pace of successive advances. Doped silicon has been the preferred material and silicon dioxide has been the preferred dielectric. Along with polysilicon, the purest form of silicon, which performs the function of a conducting metal, the metal (polysilicon), oxide insulator (silicon dioxide), and semiconductor substrate (doped silicon) troika has simplified the question of maximizing yields while maintaining high levels of seamlessness in mainstream electronic devices. The metal oxide semiconductor (MOS) paradigm is almost synonymous with silicon.

The troika is under increased pressure due to the challenges posed by 45-nm and beyond dimensioned nodes, wherein the physical properties of the silicon family are no longer able to cope with the resultant exacting demands. This report examines these challenges and evaluates possible alternative materials. We would like to clarify that the substrates and dielectrics covered in this report are the ones that are used at the wafer level and not the packaging level. 

This study has the following goals and objectives:

  • Forecasting the market size for overall semiconductor dielectrics
  • Forecasting the market size for overall semiconductor substrates
  • Breaking down the overall semiconductor dielectrics market on the basis of materials employed: silicon dioxide, low-k, and high-k
  • Breaking down the overall semiconductor substrates market on the basis of materials employed: silicon, gallium arsenide, gallium nitride, indium phosphide, sapphire, silicon carbide, and germanium
  • Breaking down the individual dielectric material type market along end-user applications and geographical regions
  • Breaking down the individual substrate material type market along end-user applications and geographical regions
  • Analyzing the historical benefits and impending challenges in the usage of silicon dioxide as a dielectric
  • Analyzing the historical benefits and impending challenges in the usage of silica dioxide as a dielectric
  • Enlisting the benefits, progress made, stakeholders involved and prospects associated with individual high-k and low-k dielectric materials
  • Enlisting the benefits, progress made, stakeholders involved, and prospects associated with individual alternative substrate materials
  • Discussing the methodologies involved in deposition of high-k and low-k dielectrics
  • Discussing the historical domains associated with individual alternative substrate materials
  • Analyzing the stakeholder value chain for dielectrics and substrates
  • Analyzing the patenting activity involving high-k and low-k dielectrics as well as alternative substrates  

The remarkable achievements obtained with silicon in the electronics domains clearly have limitations, which are closely tied to the material properties of silicon. Ironically, the drivers of electronic devices evolution have highlighted the limitations of silicon. 

  • The ever-increasing hunger for speed and bandwidth has now engulfed the wireless domain in addition to its traditional hold in the wireline domain. Frequency of operations is closely related to heat dissipated as every operational cycle results in release of energy because of state transition. The operational frequency supported by a particular medium is the function of the medium’s electron mobility. On the substrate front, the band gap parameters of silicon limit the electron mobility, making it unsuitable for high-frequency operations.
  • The scenario on the dielectric fronts is even trickier. Dielectrics are supposed to perform the function of providing capacitive coupling at semiconductor gates and providing insulation along interlayer interconnects. Miniaturization leading to compression in nodal distances has reduced the thickness of these dielectrics. This leads to leakage of electrons and loss of capacitive coupling and insulation. Industry experts have devised a two-pronged strategy of tackling this issue: Increase the capacitance at the gate level (high-k dielectric) and reduce it at the interlayer level (low-k dielectric). Naturally, a single material cannot exhibit dual characteristics; hence, the search is on for finding effective replacements for silicon dioxide on both these fronts.
  • It is not as if dielectrics and substrates can be altered in isolation. There is a very close coupling between these two elements. Dielectrics are grown on the substrate. Consequently, there has to be compatibility between them in order to ensure smooth interfaces, patterning of nanoscale features, and consistency in thermal, mechanical, and electrical properties. Any change in dielectrics, therefore, will prompt a corresponding change in substrate and vice versa.

It is widely believed that any change in the dielectric and substrate materials will have far-reaching impact on the overall electronic device value chain. However, it is not as if these alternative materials will get rid of silicon and its derivatives altogether. Thus, the industry has to tackle the most pressing design concern of interfacing all these materials with the existing silicon and its derivatives. This is the single most pressing impediment to the introduction of alternative materials. 

This reports aims at exploring the key alternative materials and forecasting their acceptance levels in the core semiconductor domain.

  • The report forecasts the size of the semiconductor dielectrics and substrates mainstream and alternative material market from 2009 through 2014.
  • The executive summary provides a snapshot of key findings of the report.
  • The section on the state of the art in dielectrics and substrates sets the ground for further discussion by identifying the position for dielectrics and substrates in semiconductor product engineering. It then defines dielectrics and substrates and enlists their key functions and areas of applications. It details the characteristics of mainstream dielectric and substrate materials – silicon dioxide and silicon, respectively.
  • The section on challenges and new approaches in dielectrics and substrates enlists and analyzes the challenges confronting silicon dioxide and silica in the continuing enhancement of speed, form-factor economy and power-consumption efficiency witnessed by semiconductor devices. It then proposes alternative materials, the reasons that make them attractive and the challenges confronting their complete integration with the mainstream CMOS processes.
  • The section on stakeholders explains the criterion for classification of stakeholders – material suppliers in case of dielectrics and wafer suppliers in case of substrates in both mainstream and alternative material categories, foundry owners, and original equipment manufacturer (OEMs). It also provides the latest information on the dielectric- and substrate-related initiatives of key companies in each category.
  • The U.S. Patent Analysis section highlights the patenting activity underway in the area of dielectric and substrates. The section classifies the patents awarded according to the activities involved in the synthesis of high- and low-k dielectrics as well as alternative substrates. It also provides a geographic and distribution by company of these patents.
    The report is punctuated with numerical findings and projections that substantiate and drive the theoretical discussion.

The report will be relevant to the following stakeholders:

  • Dielectric material suppliers, which are mainly chemical producers in assessing the size of the electronic device market for the various materials supplied by them
  • Substrate wafer suppliers for determining the future of mainstream silicon substrate wafer market as well as the market for alternative compound semiconductors as well as germanium
  • Semiconductor specialists in devising a comparative analysis of alternative materials and the state of the art in their synthesis into the mainstream manufacturing processes
  • OEMs for evaluating their pros and cons of semiconductor integrated circuits (ICs) based on mainstream and alternative material.
     

This Report Highlights:

  • Provides a comprehensive overview of the global market for dielectrics and substrates in semiconductors
  • Covers low- and ultra-low-k solutions, including porous and nonporous, organic and inorganic compounds for interlayer and intermetal applications
  • Discusses high-k candidates, ranging from nitrided silicon oxide through simple metal and rareearth oxides to ferroelectric materials for gate dielectric and super-dense gigabit memory devices
  • Analyzes the cost- and technology-based requirements and the challenge of integration into fabrication processes
  • Includes North American and global forecasts for materials by type and region
  • Offers company profiles of major chipmakers, materials suppliers and equipment manufacturers.


TABLE OF CONTENTS

Chapter- 1: INTRODUCTION -- Complimentary

STUDY GOALS AND OBJECTIVES
REASONS FOR DOING THE STUDY
SCOPE OF THE REPORT
INTENDED AUDIENCE
METHODOLOGY AND INFORMATION SOURCES
ABOUT THE AUTHOR
BCC ONLINE SERVICES
DISCLAIMER


Chapter-2: SUMMARY

SUMMARY TABLE A GLOBAL MARKET FOR DIELECTRICS AND SUBSTRATES TO SEMICONDUCTOR FOUNDRIES AND IDMS, THROUGH 2014 ($ MILLIONS)
SUMMARY FIGURE GLOBAL MARKET FOR DIELECTRICS AND SUBSTRATES TO SEMICONDUCTOR FOUNDRIES AND IDMS, 2007-2014 ($ MILLIONS)
SUMMARY TABLE B GLOBAL DIELECTRICS MARKET SHARE IN SALES BY MATERIAL TYPE, 2007–2014 (%)
SUMMARY TABLE C GLOBAL DIELECTRICS MARKET SHARE IN KGS BY MATERIAL TYPE, 2007–2014 (%)
SUMMARY TABLE D GLOBAL SUBSTRATES MARKET SHARE IN VALUE SALES BY MATERIAL TYPE, 2007–2014 (%)
SUMMARY TABLE E GLOBAL SUBSTRATES MARKET SHARE IN MSI BY MATERIAL TYPE, 2007–2014 (%)


Chapter-3: OVERVIEW

THE STATE OF THE ART IN SUBSTRATES AND DIELECTRICS
TABLE 1 GLOBAL MARKET FOR DIELECTRICS AND SUBSTRATES TO SEMICONDUCTOR FOUNDRIES AND IDMS, BY VOLUME, THROUGH 2014 (KG MILLIONS /MSI)
INTRODUCTION TO END-USE APPLICATION MARKETS
TELECOMMUNICATIONS DEVICES
COMPUTING DEVICES
CONSUMER ELECTRONIC DEVICES
INDUSTRIAL, SCIENTIFIC, AND OTHER DEVICES
TABLE 2 GLOBAL DIELECTRICS AND SUBSTRATES MARKET BY END-USE APPLICATION, THROUGH 2014 ($ MILLIONS)
TABLE 3 GLOBAL DIELECTRICS AND SUBSTRATES MARKET BY GEOGRAPHICAL REGION, THROUGH 2014 ($ MILLIONS)
THE CHEMISTRY OF SEMICONDUCTORS
SEMICONDUCTORS AND THE PERIODIC TABLE
THE CARBON FAMILY
What Makes Semiconductors Different?
Silicon and Other Semiconductors
THE TITANIUM FAMILY
THE BORON FAMILY
SOME IMPORTANT DEFINITIONS
GATE DEFINITION METHODOLOGY
Transistor-Transistor Logic (TTL)
CMOS
Field Effect Transistor (FET)
MISFET/MOSFET
BiCMOS
Metal Semiconductor Field Effect Transistor (MESFET)
High Electron Mobility Transistor (HEMT)
Hetero-Junction Bipolar Transistor (HBT)
FABRICATION PROCESSES
Rapid Thermal Processing (RTP)
Chemical Mechanical Planarization (CMP)
Damascening
OTHER ALLIED DEFINTIONS
Double Data Rate (DDR)-Synchronous Dynamic Random Access Memory (SDRAM)
Design for Manufacturability (DFM)
Design for Test (DFT)
Dynamic Random Access Memory (DRAM)
Design Rule Check (DRC)
Electronic Design Automation (EDA)
International Technology Roadmap for Semiconductors (ITRS)
THE MECHANICS OF SEMICONDUCTORS
ELECTRONIC DEVICE MANUFACTURING PROCESS
FIGURE 1 ELECTRONIC DEVICE MANUFACTURING PROCESS FLOW
ELECTRONIC DEVICE MANUFACTURING …CONTINUED/
DIELECTRICS
MARKET METRICS
TABLE 4 GLOBAL DIELECTRICS MARKET BY END-USE APPLICATION, THROUGH 2014 ($ MILLIONS)
FIGURE 2 GLOBAL DIELECTRICS MARKET BY END-USE APPLICATION, 2007-2014 ($ MILLIONS)
TABLE 5 GLOBAL MARKET VOLUME FOR DIELECTRICS BY END-USE APPLICATION, THROUGH 2014 (KG MILLIONS)
TABLE 6 GLOBAL DIELECTRICS MARKET BY GEOGRAPHICAL REGION, THROUGH 2014 ($ MILLIONS)
FIGURE 2 GLOBAL DIELECTRICS MARKET BY GEOGRAPHICAL REGION, 2007-2014 ($ MILLIONS)
TABLE 7 GLOBAL MARKET VOLUME FOR DIELECTRICS BY GEOGRAPHICAL REGION, THROUGH 2014 (KG MILLIONS)
DEFINITION AND OPERATING PRINCIPLES
Definition and Operating Principles (Continued)
USE CASES IN SEMICONDUCTOR MANUFACTURING
Interconnects
Gates
Memory
PREVALENT DOMINANT METHODOLOGY
SUBSTRATES
MARKET METRICS
TABLE 8 GLOBAL SUBSTRATES MARKET BY END-USE APPLICATION, THROUGH 2014 ($ MILLIONS)
FIGURE 3 GLOBAL SUBSTRATES MARKET BY END-USE APPLICATION, 2007-2014 ($ MILLIONS)
TABLE 9 GLOBAL MARKET VOLUME OF SUBSTRATES BY END-USE APPLICATION, THROUGH 2014 (MSI)
TABLE 10 GLOBAL SUBSTRATES MARKET BY GEOGRAPHICAL REGION, THROUGH 2014 ($ MILLIONS)
FIGURE 4 GLOBAL SUBSTRATES MARKET BY GEOGRAPHICAL REGION, 2007-2014 ($ MILLIONS)
TABLE 11 GLOBAL MARKET VOLUME OF SUBSTRATES BY GEOGRAPHICAL REGION, THROUGH 2014 (MSI)
DEFINITIONS AND OPERATING PRINCIPLES
Clarification on Packaging Substrates
USE CASES IN SEMICONDUCTOR MANUFACTURING
The Dielectric-Substrate Interplay in SOI
PREVALENT DOMINANT METHODOLOGY
Revisiting Wafers


Chapter-4: CHALLENGES AND NEW APPROACHES IN DIELECTRICS AND SUBSTRATES

DIELECTRICS
MARKET METRICS FOR SILICON DIOXIDE
TABLE 12 GLOBAL VALUE AND VOLUME SALES OF SILICON DIOXIDE TO SEMICONDUCTOR DEVICE MANUFACTURERS, THROUGH 2014 ($ MILLIONS/KG MILLIONS)
TABLE 13 GLOBAL SILICON DIOXIDE SALES BY END-USE APPLICATION, THROUGH 2014 ($ MILLIONS)
TABLE 14 GLOBAL VOLUME SALES OF SILICON DIOXIDE BY END-USE APPLICATION, THROUGH 2014 (KG MILLIONS)
CHALLENGES
Electrical Leakages
High-Speed Operations
Power Consumption Considerations
Decreasing Form Factors
IMPLICATIONS FOR DIELECTRICS
Modifications in Deposition Processes
ALTERNATIVE APPROACHES – THE HIGH-K AND THE LOW-K DIELECTRICS
Market Metrics for High-k and Low-k Dielectrics – Salient Trends
Overview of Alternative Approaches
High-k Dielectrics
Low-k Dielectrics
ALTERNATIVE HIGH-K MATERIALS
Market Metrics for High-k Dielectrics
TABLE 15 GLOBAL VALUE AND VOLUME SALES OF HIGH-K DIELECTRICS TO SEMICONDUCTOR DEVICE MANUFACTURERS, THROUGH 2014 ($ MILLIONS/KG MILLIONS)
TABLE 16 GLOBAL HIGH-K DIELECTRICS SALES BY END-USE APPLICATION, THROUGH 2014 ($ MILLIONS)
TABLE 17 GLOBAL VOLUME SALES OF HIGH-K DIELECTRICS BY END-USE APPLICATION, THROUGH 2014 (KG MILLIONS)
Hafnium Oxide
Background
Use Cases
Benefits
Challenges
Titanium Dioxide
Background
Use Cases
Benefits
Challenges
Zirconium Oxide
Background
Use Cases
Benefits
Challenges
Silicon Nitride
Background
Use Cases
Benefits
Challenges
ALTERNATIVE LOW-K MATERIALS
Market Metrics for Low-k Dielectrics
TABLE 18 GLOBAL VALUE AND VOLUME SALES OF LOW-K DIELECTRICS TO SEMICONDUCTOR DEVICE MANUFACTURERS, THROUGH 2014 ($ MILLIONS/KG MILLIONS)
TABLE 19 GLOBAL LOW-K DIELECTRICS MARKET BY END-USE APPLICATIONS, THROUGH 2014 ($ MILLIONS)
TABLE 20 GLOBAL MARKET VOLUME FOR LOW-K DIELECTRICS BY END-USE APPLICATION, THROUGH 2014 (KG MILLIONS)
Black Diamond
SiLK
Polyimide
Teflon
Diethoxymethylsilanes (DEMS)-Based Polymer
Hydrogen Silsesquioxane (HSQ)
SUBSTRATES
MARKET METRICS FOR SILICON DIOXIDE
TABLE 21 GLOBAL VALUE AND VOLUME SALES OF SILICON TO SEMICONDUCTOR DEVICE MANUFACTURERS, THROUGH 2014 ($ MILLIONS/MSI)
TABLE 22 GLOBAL SILICON MARKET BY END-USE APPLICATION, 2007–2014 ($ MILLIONS)
TABLE 23 GLOBAL MARKET VOLUME OF SILICON BY END-USE APPLICATION, THROUGH 2014 (MSI)
CHALLENGES
ALTERNATIVE APPROACHES AND MATERIALS
Market Metrics for Alternative Substrate Material – Salient Trends
GaAs
Market Metrics
TABLE 24 GLOBAL VALUE AND VOLUME SALES OF GALLIUM ARSENIDE TO SEMICONDUCTOR DEVICE MANUFACTURERS, THROUGH 2014 ($ MILLIONS/MSI)
TABLE 25 GLOBAL GALLIUM ARSENIDE MARKET BY END-USE APPLICATION, THROUGH 2014 ($ MILLIONS)
TABLE 26 GLOBAL MARKET VOLUME OF GALLIUM ARSENIDE BY END-USE APPLICATION, THROUGH 2014 (MSI)
Background
Use Cases
Benefits
Challenges
GaN
Market metrics
TABLE 27 GLOBAL VALUE AND VOLUME SALES OF GALLIUM NITRIDE TO SEMICONDUCTOR DEVICE MANUFACTURERS, THROUGH 2014 ($ MILLIONS/MSI)
TABLE 28 GLOBAL GALLIUM NITRIDE MARKET BY END-USE APPLICATION, THROUGH 2014 ($ MILLIONS)
TABLE 29 GLOBAL MARKET VOLUME OF GALLIUM NITRIDE BY END-USE APPLICATION, THROUGH 2014 (MSI)
Background
Use Cases
Benefits
Challenges
Indium Phosphide
Market Metrics
TABLE 30 GLOBAL VALUE AND VOLUME SALES OF INDIUM PHOSPHIDE TO SEMICONDUCTOR DEVICE MANUFACTURERS, THROUGH 2014 ($ MILLIONS/MSI)
TABLE 31 GLOBAL INDIUM PHOSPHIDE MARKET BY END-USE APPLICATION, THROUGH 2014 ($ MILLIONS)
TABLE 32 GLOBAL MARKET VOLUME OF INDIUM PHOSPHIDE BY END-USE APPLICATION, THROUGH 2014 (MSI)
Background
Silicon Carbide
Market Metrics
TABLE 33 GLOBAL VALUE AND VOLUME SALES OF SILICON CARBIDE TO SEMICONDUCTOR DEVICE MANUFACTURERS, THROUGH 2014 ($ MILLIONS/MSI)
TABLE 34 GLOBAL SILICON CARBIDE MARKET BY END-USE APPLICATION, THROUGH 2014 ($ MILLIONS)
TABLE 35 GLOBAL MARKET VOLUME OF SILICON CARBIDE BY END-USE APPLICATION, THROUGH 2014 (MSI)
Background
Sapphire
Market Metrics
TABLE 36 GLOBAL VALUE AND VOLUME SALES OF SAPPHIRE TO SEMICONDUCTOR DEVICE MANUFACTURERS, THROUGH 2014 ($ MILLIONS/MSI)
TABLE 37 GLOBAL SAPPHIRE MARKET BY END-USE APPLICATION, THROUGH 2014 ($ MILLIONS)
TABLE 38 GLOBAL MARKET VOLUME OF SAPPHIRE BY END-USE APPLICATION, THROUGH 2014 (MSI)
Background
Germanium
Market Metrics
TABLE 39 GLOBAL VALUE AND VOLUME SALES OF GERMANIUM TO SEMICONDUCTOR DEVICE MANUFACTURERS, THROUGH 2014 ($ MILLIONS/MSI)
TABLE 40 GLOBAL GERMANIUM MARKET BY END-USE APPLICATION, THROUGH 2014 ($ MILLIONS)
TABLE 41 GLOBAL MARKET VOLUME OF GERMANIUM BY END-USE APPLICATION, THROUGH 2014 (MSI)
Background


Chapter-5: DIELECTRICS AND SUBSTRATES SUPPLY CHAIN ANALYSIS

PLAYER CATEGORIZATION
RAW MATERIAL PROVIDERS
Roles
Drivers
Challenges
Initiatives
SEMICONDUCTOR MAJORS
Roles
Drivers
Challenges
Initiatives
FOUNDRY OWNERS
Roles
Drivers
Challenges
Initiatives
FABLESS PLAYERS
Roles
Drivers
Challenges
Initiatives
OEMS AND ENGINEERING MANUFACTURING SERVICE (EMS) PROVIDERS
REGIONAL DYNAMICS
REGIONAL BACKGROUND
SALIENT FEATURES OF METRICS
REGIONAL DISTRIBUTION METRICS
TABLE 42 GLOBAL MARKET SHARE OF ALTERNATIVE SUBSTRATE MATERIALS, 2007–2014 (%)
TABLE 43 GLOBAL MARKET VOLUME SHARE OF ALTERNATIVE SUBSTRATE MATERIALS, 2007–2014 (%)
TABLE 44 GLOBAL SILICON DIOXIDE MARKET BY GEOGRAPHICAL REGION, THROUGH 2014 ($ MILLIONS)
TABLE 45 GLOBAL MARKET VOLUME OF SILICON DIOXIDE BY GEOGRAPHICAL REGION, THROUGH 2014 (KG MILLIONS)
TABLE 46 GLOBAL HIGH-K DIELECTRICS MARKET BY GEOGRAPHICAL REGION, THROUGH 2014 ($ MILLIONS)
TABLE 47 GLOBAL MARKET VOLUME OF HIGH-K DIELECTRICS BY GEOGRAPHICAL REGION, THROUGH 2014 (KG MILLIONS)
TABLE 48 GLOBAL LOW-K DIELECTRICS MARKET BY GEOGRAPHICAL REGION, THROUGH 2014 ($ MILLIONS)
TABLE 49 GLOBAL MARKET VOLUME OF LOW-K DIELECTRICS BY GEOGRAPHICAL REGION, THROUGH 2014 (KG MILLIONS)
TABLE 50 GLOBAL SILICON MARKET BY GEOGRAPHICAL REGION, THROUGH 2014 ($ MILLIONS)
TABLE 51 GLOBAL MARKET VOLUME OF SILICON BY GEOGRAPHICAL REGION, THROUGH 2014 (MSI)
TABLE 52 GLOBAL GALLIUM ARSENIDE MARKET BY GEOGRAPHICAL REGION, THROUGH 2014 ($ MILLIONS)
TABLE 53 GLOBAL MARKET VOLUME OF GALLIUM ARSENIDE BY GEOGRAPHICAL REGION, THROUGH 2014 (MSI)
TABLE 54 GLOBAL GALLIUM NITRIDE MARKET BY GEOGRAPHICAL REGION, THROUGH 2014 ($ MILLIONS)
TABLE 55 GLOBAL MARKET VOLUME OF GALLIUM NITRIDE BY GEOGRAPHICAL REGION, THROUGH 2014 (MSI)
TABLE 56 GLOBAL INDIUM PHOSPHIDE MARKET BY GEOGRAPHICAL REGION, THROUGH 2014 ($ MILLIONS)
TABLE 57 GLOBAL MARKET VOLUME OF INDIUM PHOSPHIDE BY GEOGRAPHICAL REGION, THROUGH 2014 (MSI)
TABLE 58 GLOBAL SILICON CARBIDE MARKET BY GEOGRAPHICAL REGION, THROUGH 2014 ($ MILLIONS)
TABLE 59 GLOBAL MARKET VOLUME OF SILICON CARBIDE BY GEOGRAPHICAL REGION, THROUGH 2014 (MSI)
TABLE 60 GLOBAL SAPPHIRE MARKET BY GEOGRAPHICAL REGION, THROUGH 2014 ($ MILLIONS)
TABLE 61 GLOBAL MARKET VOLUME OF SAPPHIRE BY GEOGRAPHICAL REGION, THROUGH 2014 (MSI)
TABLE 62 GLOBAL GERMANIUM MARKET BY GEOGRAPHICAL REGION, THROUGH 2014 ($ MILLIONS)
TABLE 63 GLOBAL MARKET VOLUME OF GERMANIUM BY GEOGRAPHICAL REGION, THROUGH 2014 (MSI)
CYCLICALITY
KEY COMPANY ACTIVITY SUMMARY
AMD
General Background
Initiatives Related to Dielectrics
Initiatives Related to Substrates
Outlook and Analysis
AMERICAN ELEMENTS
General Background
Initiatives Related to Dielectrics
Initiatives Related to Substrates
Outlook and Analysis
ANADIGICS
General Background
Initiatives Related to Substrates
Outlook and Analysis
APPLIED MATERIALS
General Background
Initiatives Related to Dielectrics
Initiatives Related to Substrates
Outlook and Analysis
ASML
General Background
Initiatives Related to Substrates
Outlook and Analysis
CHARTERED SEMICONDUCTOR
General Background
Initiatives Related to Dielectrics
Initiatives Related to Substrates
Outlook and Analysis
DOW CHEMICAL
General Background
Initiatives Related to Dielectrics
Outlook and Analysis
DOW CORNING
General Background
Initiatives Related to Dielectrics
Outlook and Analysis
FUJITSU MICROELECTRONICS
General Background
Initiatives Related to Dielectrics
Initiatives Related to Substrates
Outlook and Analysis
IBM
General Background
Initiatives Related to Dielectrics
Initiatives Related to Substrates
Outlook and Analysis
INTEL
General Background
Initiatives Related to Dielectrics
Outlook and Analysis
LSI LOGIC
General Background
Initiatives Related to Dielectrics
Outlook and Analysis
MEMC ELECTRONIC MATERIALS
General Background
Initiatives Related to Substrates
Outlook and Analysis
NEC ELECTRONICS
General Background
Initiatives Related to Dielectrics
Outlook and Analysis
NEWWAY SEMICONDUCTOR
General Background
Initiatives Related to Substrates
Outlook and Analysis
SAMSUNG ELECTRONICS
General Background
Initiatives Related to Dielectrics
Initiatives Related to Substrates
Outlook and Analysis
SHIN ETSU CHEMICAL CO., LTD.
General Background
Initiatives Related to Dielectrics
Initiatives Related to Substrates
Outlook and Analysis
SILICON SENSE
General Background
Initiatives Related to Substrates
Outlook and Analysis
SILTRONIC
General Background
Initiatives Related to Substrates
Outlook and Analysis
ST MICROELECTRONICS
General Background
Initiatives Related to Dielectrics
Initiatives Related to Substrates
Outlook and Analysis
STANFORD MATERIALS
General Background
Initiatives Related to Dielectrics
Initiatives Related to Substrates
Outlook and Analysis
SUMITOMO METAL INDUSTRIES LTD./SUMCO
General Background
Initiatives Related to Substrates
Outlook and Analysis
TEXAS INSTRUMENTS
General Background
Initiatives Related to Dielectrics
Outlook and Analysis
TOSHIBA
General Background
Initiatives Related to Dielectrics
Initiatives Related to Substrates
Outlook and Analysis
TAIWAN SEMICONDUCTOR MANUFACTURING CO. (TSMC)
General Background
Initiatives Related to Dielectrics
Initiatives Related to Substrates
Outlook and Analysis
UMC
General Background
Initiatives Related to Dielectrics
Initiatives Related to Substrates
Outlook and Analysis


Chapter-6: U.S. PATENT ANALYSIS

INTRODUCTION
TRENDS BY FUNCTIONAL CATEGORIES
TABLE 64 NUMBER OF U.S. PATENTS IN ALTERNATIVE DIELECTRICS AND SUBSTRATES BY CATEGORY, 1976–SEPTEMBER 2009
TRENDS BY YEAR
TABLE 65 U.S. PATENT TRENDS IN ALTERNATIVE DIELECTRICS AND SUBSTRATES BY YEAR OF GRANT, 1976–SEPTEMBER 2008 (NUMBER)
TRENDS BY COUNTRY
TABLE 66 SHARES OF U.S. PATENTS ON ALTERNATIVE DIELECTRICS AND SUBSTRATES- BY COUNTRY, 1976–SEPTEMBER 2009
TRENDS BY ASSIGNEE
TABLE 67 LIST OF ASSIGNEES FOR U.S. PATENTS ON ALTERNATIVE DIELECTRICS AND SUBSTRATES, 1976–SEPTEMBER 2009
TABLE 67 (CONTINUED)
TABLE 68 ASSIGNEES OF TEN OR MORE U.S. PATENTS ON ALTERNATIVE DIELECTRICS AND SUBSTRATES, 1976–SEPTEMBER 2009

 

 

 


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