Piezo actuators are electromechanical “motors”, based on the solid state piezomechanical deformation effect of piezoceramics (PZT lead zirconium titanate). Highlights are unlimited positioning sensitivity (sub-nanometers), high load capability, and high force generation, resulting in ideal mechanical dynamics with reaction times down to microseconds. Only piezo actuation allows top innovations in mechatronics like nano-positioning or high pressure common rail fuel injection.

Piezoelectric actuators are at an important stage of development into a large component market. Market pull is generated by large demand for ultra-small scale precision motion devices used in manufacturing and inspection equipment, high volume, low cost auto-focus assemblies required in phone cameras, and high volume, moderate cost ink printing cartridges used in printers; and partly by demand for micro actuator medical tools used in minimally invasive surgery and micro-grippers required in manufacturing micro-sized objects such as stents; and partly by dynamically-driven high temperature actuators for diesel injector valves in automobiles. Cost, yield and reliability are important concerns for each of these six applications. A number of these concerns relate to basic material science issues in the manufacture of the piezoelectric actuators for these targeted, diversified applications.

This report also deals with ultrasonic motors (USMs) that belong to the class of piezoelectric motors. In this work, the term “USM” will be used for the motor only (in other words, power electronics and closed-loop controls are not included). The system composed of the motor, power electronics, and closed-loop control will be called the ultrasonic actuator or piezoelectric actuator. The working principle of these motors has been well known for at least 50 years. However, they generated widespread interest only with the influential work of Sashida in 1982. Before that time, piezoceramic materials with high conversion efficiency and fast electronic power control of ultrasonic vibrations were not available.

Due to their specific advantages compared to conventional electromagnetic motors, USMs fill a gap in certain actuator applications. A key advantage of USMs over electromagnetic motors is their compactness, i.e., their high stall torque-mass ratio and high torque at low rotational speed, often making speed-reducing gears superfluous. Additionally, with no voltage applied, an inherent holding torque is present due to the frictional driving mechanism. It is also notable that their compactness and the high frequency electrical excitation make quick responses possible. USMs also offer a high potential for miniaturization. These actuators produce no magnetic field, since the excitation is quasi-electrostatic.

STUDY GOAL AND OBJECTIVES

This study focuses on key piezoelectric-operated actuators and motors and provides data about the size and growth of these markets, along with company profiles and industry trends. The goal of this report is to provide a detailed and comprehensive multi-client study of the markets in North America, Europe, Japan, China, India, Korea and the rest of the world (ROW) for piezoelectric-operated actuators and motors, as well as potential business opportunities in the future.

The objectives include thorough coverage of underlying economic issues driving the piezoelectric-operated actuators and motors business, as well as assessments of new, advanced piezoelectric-operated actuators and motors that are in development. Also covered are legislative pressures for more safety and environmental protection, as well as users’ expectations for economical actuators and motors. Another important objective is to provide realistic market data and forecasts for piezoelectric operated actuators and motors. This study provides the most thorough and up-to-date assessment that can be found anywhere on the subject. The study also provides extensive quantification of the many important facets of market development in piezoelectric-operated actuators and motors. This, in turn, contributes to a determination of the kinds of strategic responses companies may adopt in order to compete in these dynamic markets.

Users of piezoelectric actuators and motors in developed markets must contend with twin pressures – to innovate and, at the same time, to reduce costs. New applications, such as piezo fuel injectors, ink cartridges in printers, micro-pumps, micro-grippers, and micro-surgery tools for piezoelectric actuators and motors, have been proposed in recent years. This study condenses all of these business related issues and opportunities.

CONTRIBUTIONS OF THE STUDY

The report covers technology, product analysis, manufacturers’ profiles, competitive analysis, raw material suppliers, electronic suppliers, system integrators, material and material cost analysis, market dynamics and patent status of leading players ,to provide a complete picture of the status and growth of the piezoelectric actuator market on a global scale from 2009 to 2014.

This study provides the most complete accounting of the current market and future growth in piezoelectric actuators and motors. The study also provides extensive quantification of the important facets of market developments in emerging markets for these actuators and motors, such as China.

REPORT SUMMARY

A confluence of new piezo-based technology has breathed new capability into the nano- and micro-positioning world. Piezo actuation is increasingly suitable for applications formerly addressable only by magnetic motors, and the technology offers significant benefits in terms of size, speed, fieldlessness, reliability, vacuum compatibility, resolution and dynamics. These benefits, in turn, enable significant advances in existing and new applications. Examples of these applications abound. For instance, optical assemblies of escalating sophistication require multiple axes of nanoprecision alignment that must remain aligned for months of round-the-clock usage. Another example is emerging nano-imprint lithography methods which demand exacting positioning and trajectory control and must retain alignment integrity under significant physical and thermal stresses. Applications ranging from cell phone cameras to endoscopy and fluid delivery mechanisms require exceedingly small but stiff, responsive, and reliable positioning of optics, probes and shutters. Until recently, these conflicting requirements had no solution.

Piezomotors and actuators typically eliminate any need for gear reduction because they drive loads directly. One way to understand how a piezomotor generates motive force is to examine the SQUIGGLE® motor. It can move with 1,000 times more precision than an electromagnetic motor while hitting nanometer resolutions. In contrast, electromagnetic motors struggle to give micrometer resolution.

Piezoelectric actuators have been commercialized in various areas such as information technology, robotics, biomedical engineering, automotive, ecological and energy engineering.  They are coming to be preferred over electromagnetic-type actuators, due mainly to suitability to miniaturization, lack of electromagnetic generation, higher efficiency and non-inflammability.

Piezoelectric actuators and motors vary significantly in shapes and manufacturing technologies in order to address distinctly different market segments such as ultra-small scale precision motion devices in manufacturing and inspection equipment, phone cameras, ink printing cartridges, micro-actuator tools used in minimally invasive surgery, micro-grippers required in manufacturing micro-size objects such as stents, and high temperature actuators for diesel injector valves in automobiles.

Major findings of this report are:

• The 2009 global market for piezoelectric operated actuators and motors was estimated to be $6.6 billion, and the market is estimated to reach $12.3 billion by 2014, showing an average annual growth rate of 13.2% per year.

• The market for piezoelectric-operated actuators and motors in ultra-small scale precision motion related applications will be the largest segment, estimated to have reached $3,200 million (48.6% share) in 2009 and projected to reach $6,000 million in 2014, for an AAGR of 13.4%.  The other major segment includes phone cameras, digital cameras, microscope lenses, mirrors and optics, estimated at $2,800 million (42.5% share) in 2009 and $5,200 million in 2014, for an AAGR of 13.1%.

• The remaining 8.9% ($587 million) is a third market segment consisting of auto fuel injectors, micro-pumps, micro-blowers, printer cartridges, surgical instruments, mini-robots, etc.). In 2014, this market segment will have a share of 8.7% ($1,090 million).

• The manufacturers of optics, photonics and nanometrology equipment have been the major consumers of piezoelectric-operated motors and actuators.

• Life sciences and medical technology also constitute a high-growth segment of the piezoelectric-operated actuators and motors market. This area is expected to grow at 18.7% annually and could record an even higher growth rate if there is wider acceptance by end users. It is still going through a gestation period.

• Over the projected period of five years, market share of piezoelectric-operated actuators and motors will increase, taking share from electromagnetic motors.

• In terms of regional market share, North America leads, with 40.5% in 2009, followed by Europe with 34%, Japan with 20%, and the balance 5.5% for China and the rest of the world.

TABLE OF CONTENTS


INTRODUCTION I
STUDY GOAL AND OBJECTIVES II
REASONS FOR DOING THE STUDY II
CONTRIBUTIONS OF THE STUDY III
SCOPE AND FORMAT III
METHODOLOGY IV
INFORMATION SOURCES IV
TARGET AUDIENCE FOR THE STUDY V
AUTHOR’S CREDENTIALS V
EXECUTIVE SUMMARY VII
SUMMARY TABLE   GLOBAL MARKET SIZE/PERCENTAGE SHARE FOR PIEZOELECTRIC ACTUATORS AND MOTORS BY APPLICATION, THROUGH 2014 VIII
SUMMARY FIGURE  GLOBAL SHARE FOR PIEZOELECTRIC ACTUATORS AND MOTORS BY APPLICATION, 2009 AND 2014 ($ MILLIONS) IX
INDUSTRY OVERVIEW 1
INDUSTRY DYNAMICS 1
INDUSTRY STRUCTURE 2
INDUSTRY STRUCTURE (CONTINUED) 3
TABLE 1  COMPANY PRODUCT REFERENCE FOR PIEZOELECTRIC ACTUATOR AND MOTOR MANUFACTURERS, MATERIAL SUPPLIERS, SYSTEM INTEGRATORS/AMPLIFIER AND CONTROLLER SUPPLIERS 4
TABLE 1 CONTINUED 5
TECHNOLOGY OVERVIEW 6
PIEZO MECHANICS 6
SYMBOLS AND DEFINITIONS 7
PIEZOELECTRIC CONSTANTS 7
FIGURE 1  DESIGNATION OF THE AXES AND DIRECTIONS OF DEFORMATION 8
TABLE 2  GENERAL PIEZO SYMBOLS 8
TABLE 2 COTINUED 9
PIEZO THEORY 10
PIEZOELECTRIC MATERIALS 10
FIGURE 2  PZT ELEMENTARY CELL BEFORE AND AFTER POLING (DC FIELD APPLIED) 11
FIGURE 3  ELECTRICAL DIPOLE MOMENTS IN WEISS DOMAINS 12
TYPES OF PIEZOELECTRIC ACTUATORS 13
TYPES OF PIEZOELECTRIC MOTORS 13
TYPES OF PIEZOELECTRIC MOTORS (CONTINUED) E14
FIGURE 4  STANDING WAVE ULTRASONIC MOTOR 15
TABLE 3  FORMULAS USED IN PIEZOELECTRIC TECHNOLOGY 16
TABLE 3 CONTINUED 17
MATERIALS FOR PIEZOELECTRIC ACTUATORS AND MOTORS 17
TABLE 4  MATERIAL CONSTANTS OF PIEZOCERAMIC MATERIALS USED IN PIEZOELECTRIC-DRIVEN ACTUATORS AND MOTORS 18
TABLE 4 CONTINUED 19
ELECTRODE MATERIALS 20
PZT MATERIAL CHARACTERISTICS 20
HYSTERESIS 20
CREEP 21
EXTENSION UNDER LOAD 21
POWER DISSIPATION 21
OPERATION UNDER REVERSE BIAS 22
FIGURE 5  HYSTERESIS BEHAVIOR OF PIEZOELECTRIC MATERIAL 23
LINEARITY 23
THERMAL PROPERTIES AND TEMPERATURE COEFFICIENTS 24
MATERIALS FOR CONSTRUCTION OF PIEZOELECTRIC ACTUATORS AND MOTORS 24
TABLE 5  MATERIALS USED FOR FABRICATING BASIC PIEZO ELECTRIC ACTUATORS 25
TABLE 5 CONTINUED 26
TABLE 5 CONTINUED 27
MANUFACTURE OF MULTILAYER CO-FIRED ACTUATORS 28
FIGURE 6  PROCESS FOLLOWED IN CO-FIRED PIEZOELECTRIC MATERIAL 29
METALLIZATION 29
PZT-BASED MEMS DEVICES 30
TABLE 6  TYPICAL MATERIALS USED IN PZT-BASED MEMS DEVICES 30
ELECTRONICS (AMPLIFIERS AND CONTROLLERS) USED WITH PIEZOELECTRIC ACTUATORS 31
TABLE 7  AMPLIFIERS AND CONTROLLERS USED FOR ULTRA-SMALL SCALE MOTION OF PIEZOELECTRIC ACTUATORS 32
ELECTRONICS USED WITH PIEZOELECTRIC MOTORS/ULTRASONIC MOTORS IN AUTO-FOCUS AND ZOOM FUNCTIONS IN PHONE CAMERAS 33
CASE STUDIES OF USAGE OF PIEZOELECTRIC ACTUATORS AND MOTORS 33
ULTRA-SMALL SCALE PRECISION MOTIONS 33
FIGURE 7  PIEZO ELECTRIC NANO MANUPULATOR 34
ULTRA-SMALL SCALE PRECISION MOTIONS (CONTINUED) 35
PART-PIEZO ELECTRIC MOTORS 36
PART-PIEZO ELECTRIC MOTORS (CONTINUED) 37
FIGURE 8  TYPICAL OPTICAL ZOOM USING TWO SQUIGGLE® MOTORS 38
PART-PIEZO ELECTRIC MOTORS (CONTINUED) 39
PIEZO MOTORS IN SURGICAL ROBOTS 40
FIGURE 9  SURGICAL MICROMANIPULATOR WITH TWO FINGERS OPERATED BY PIEZO ACTUATORS 41
PIEZO MOTORS IN SURGICAL ROBOTS (CONTINUED) 42
PIEZO MOTORS IN SURGICAL ROBOTS (CONTINUED) 43
APPLICATIONS 44
ULTRA-SMALL SCALE PRECISION MOTION DEVICES 44
TABLE 8  MARKET SEGMENTS EMPLOYING ULTRA-SMALL SCALE MOTION PIEZOELECTRIC ACTUATORS 45
TABLE 8 CONTINUED 46
TABLE 8 CONTINUED 47
ULTRA-SMALL SCALE PRECISION MOTION DEVICES (CONTINUED) 48
ULTRA-SMALL SCALE PRECISION MOTION DEVICES (CONTINUED) 49
NANO-POSITIONING SYSTEMS 50
TABLE 9  TYPES OF BASIC PIEZO ELECTRIC ACTUATORS FOR ULTRA SMALL SCALE PRECISION MOTION 51
TABLE 9 CONTINUED 52
TABLE 9 CONTINUED 53
TABLE 9 CONTINUED 54
COMMERCIAL DESIGNS IN USE 54
TABLE 10  TYPICAL SHAPE VARIANTS AND BRANDS OF PIEZOELECTRIC ACTUATORS COMMERCIALIZED FOR SMALL SCALE PRECISION MOTION 55
TABLE 10 CONTINUED 56
TABLE 10 CONTINUED 57
TABLE 10 CONTINUED 58
TABLE 10 CONTINUED 59
TABLE 10 CONTINUED 60
AUTO-FOCUS APPLICATIONS IN PHONE CAMERAS AND COMMERCIAL TYPES 61
DISCRETE VERSUS CONTINUOUS MOVEMENT MOTORS 61
DISCRETE VERSUS CONTINUOUS MOVEMENT MOTORS (CONTINUED) 62
DISCRETE VERSUS CONTINUOUS MOVEMENT MOTORS (CONTINUED) 63
ULTRASONIC MOTORS 64
FIGURE 10  MOBILE PHONE CAMERA AUTO-FOCUS MODULE USING A PIEZO MOTOR 65
ULTRASONIC MOTORS (CONTINUED) 66
TABLE 11  TYPES OF PIEZOELECTRIC MOTORS 67
TABLE 11 CONTINUED 68
TABLE 11 CONTINUED 69
TABLE 11 CONTINUED 70
TABLE 11 CONTINUED 71
APPLICATIONS IN INK PRINTING CARTRIDGES 71
APPLICATIONS IN INK PRINTING CARTRIDGES (CONTINUED) 72
TABLE 12  MICROVALVE ACTUATORS AND PIEZO INK CARTRIDGES 73
TABLE 12 CONTINUED 74
TABLE 12 CONTINUED 75
TABLE 12 CONTINUED 76
APPLICATIONS IN MICRO-MIRRORS, MICRO-PUMPS AND MICRO-BLOWERS 77
TABLE 13  PIEZO MICRO-MIRRORS, MICRO-PUMPS AND MICRO-BLOWERS 77
TABLE 13 CONTINUED 78
TABLE 13 CONTINUED 79
TABLE 13 CONTINUED 80
TABLE 14  REPRESENTATIVE CHARACTERISTICS OF FABRICATION TECHNOLOGIES FOR PIEZO ACTUATORS 80
APPLICATIONS IN MICRO-ACTUATOR TOOLS USED IN MINIMALLY INVASIVE SURGERY AND MICRO-GRIPPERS REQUIRED IN MANUFACTURING MICRO-SIZE OBJECTS SUCH AS STENTS 80
TABLE 15  PIEZO MICRO SURGERY TOOLS, MICRO-GRIPPERS AND MINI-ROBOTS 81
TABLE 15 CONTINUED 82
APPLICATIONS FOR DIESEL INJECTOR VALVES IN AUTOMOBILES 83
APPLICATIONS FOR DIESEL INJECTOR VALVES IN AUTOMOBILES (CONTINUED) 84
TABLE 16  TYPES OF PIEZO UNIT INJECTORS 85
TABLE 16 CONTINUED 86
PRICE STRUCTURE 87
TABLE 17  TYPICAL PRICES FOR PIEZOELECTRIC ACTUATORS FOR ULTRA-SMALL SCALE PRECISION MOTIONS 87
TABLE 18  PRICE STRUCTURE VARIATION FOR PIEZOELECTRIC ACTUATORS / MOTORS FOR FIVE OTHER MARKET SEGMENTS 88
TABLE 18 CONTINUED 89
TABLE 19  TYPICAL PRICE PATTERNS OF ELECTRONIC CONTROLS OF HIGH VOLUME, LOW COST PIEZOELECTRIC MOTORS FOR AUTO-FOCUS AND ZOOM FUNCTIONS IN PHONE CAMERAS 89
INDUSTRY STRUCTURE AND DYNAMICS 90
BUSINESS MODELS AND INDUSTRY PLAYERS 91
BUSINESS MODELS 91
BUSINESS MODELS (CONTINUED) 92
MARKET DYNAMICS 93
COMPETITION 94
MERGERS, ACQUISITIONS AND DIVESTITURES 95
TABLE 20  ACQUISITION DEALS AMONG MANUFACTURERS OF PIEZOELECTRIC MOTORS AND ACTUATORS FROM 2004 TO 2009 96
GLOBAL MARKETS AND MARKET TRENDS 97
MARKET ACCORDING TO APPLICATIONS 97
TABLE 21  GLOBAL MARKET SIZE/PERCENTAGE SHARE FOR PIEZOELECTRIC MOTORS AND ACTUATORS BY APPLICATION FROM 2009 TO 2014 98
FIGURE 11  GLOBAL MARKET SHARE FOR PIEZOELECTRIC MOTORS AND ACTUATORS BY APPLICATION FROM 2009 TO 2014 99
FIGURE 11 CONTINUED 100
MARKET ACCORDING TO MATERIALS USED 100
TABLE 22  GLOBAL MARKET SIZE/PERCENTAGE SHARE FOR PIEZOELECTRIC MOTORS AND ACTUATORS BY MATERIAL USED FROM 2009 TO 2014 101
FIGURE 12  GLOBAL MARKET SHARE FOR PIEZOELECTRIC MOTORS AND ACTUATORS BY MATERIAL USED FROM 2009 TO 2014 102
MARKET ACCORDING TO REGIONS 103
TABLE 23  GLOBAL MARKET SIZE/PERCENTAGE SHARE FOR PIEZOELECTRIC MOTORS AND ACTUATORS BY REGION FROM 2009 TO 2014 103
FIGURE 13  GLOBAL MARKET SIZE/PERCENTAGE SHARE FOR  PIEZOELECTRIC MOTORS AND ACTUATORS  BY  REGION FROM 2009 TO 2014 104
MARKET DRIVERS AND TRENDS 105
MINIATURIZATION OF MOTORS 105
VOLUME PRODUCTION OF MULTILAYER PIEZO ACTUATORS 106
VOLUME PRODUCTION OF MULTILAYER PIEZO ACTUATORS (CONTINUED) 107
DEVELOPMENT OF TRAVELING WAVE MOTORS 108
DEVELOPMENT OF STANDING WAVE MOTORS 108
HYBRID DESIGNS 108
MOTOR OPTIMIZATION 109
MOTOR OPTIMIZATION (CONTINUED) 110
PATENTS AND PATENT ANALYSIS PATENTS AND PATENT ANALYSIS 111
PIEZO ACTUATOR AND ASSOCIATED PRODUCTION METHOD 111
METHOD AND DEVICE FOR CONTROLLING A PIEZO ACTUATOR 111
PIEZO ACTUATOR COMPRISING MEANS FOR COMPENSATING THERMAL LENGTH MODIFICATIONS AND FUEL INJECTION VALVE COMPRISING A PIEZO ACTUATOR 112
PIEZO-ACTUATOR 112
PIEZOELECTRIC ULTRASOUND MOTOR 112
HEAT EFFICIENT MICROMOTOR 113
PIEZOELECTRIC MOTORS AND METHODS FOR THE PRODUCTION AND OPERATION THEREOF 113
PIEZOMOTOR WITH A GUIDE 113
MULTIDIRECTIONAL PIEZOELECTRIC MOTOR CONFIGURATION 114
MULTIPLE DEGREE OF FREEDOM MICRO ELECTRO-MECHANICAL SYSTEM POSITIONER AND ACTUATOR 114
FREQUENCY-CONTROL-TYPE PIEZO ACTUATOR DRIVING CIRCUIT AND METHOD OF DRIVING THE SAME. 115
CONTROL DEVICE FOR PIEZO ACTUATORS OF FUEL INJECTION VALVES 115
METHOD AND DEVICE FOR CONTROLLLING AN INJECTOR 115
SEALING ARRANGEMENT FOR A PIEZO ACTUATOR OF A FUEL INJECTOR 116
METHOD FOR THE PRODUCTION OF MONOLITHIC MULTILAYER ACTUATOR MADE OF A PIEZOCERAMIC OR ELECTROSTRICTIVE MATERIAL AND EXTERNAL ELECTRICAL CONTACT FOR THE SAME 116
HIGH RESOLUTION PIEZOELECTRIC MOTOR 117
MULTILAYER PIEZOELECTRIC MOTOR 117
PIEZOELECTRIC MOTORS AND MOTOR DRIVING CONFIGURATIONS 117
RESONANCE SHIFTING 118
METHOD FOR OPERATING A PIEZOELECTRIC MOTOR, AND PIEZOELECTRIC MOTOR COMPRISING A STATOR IN THE FORM OF A HOLLOW-CYLINDRICAL OSCILLATOR 118
PROCESS FOR THE MANUFACTURE OF PIEZOCERAMIC MULTILAYER ACTUATORS 119
METHOD OF FABRICATING AN ARRAY OF MULTI-ELECTRODED PIEZOELECTRIC TRANSDUCERS FOR PIEZOELECTRIC DIAPHRAGM STRUCTURES 119
PIEZO ACTUATOR 119
PIEZO ACTUATOR DRIVING CIRCUIT 120
PIEZO ACTUATOR COMPRISING A STRUCTURED EXTERNAL ELECTRODE 120
MICRO POSITION-CONTROL SYSTEM 121
POSITIONING DEVICE FOR MICROSCOPIC MOTION 121
POLING SYSTEM FOR PIEZOELECTRIC DIAPHRAGM STRUCTURES 121
PIEZO ELECTRONIC THROTTLE CONTROL ACTUATOR. 122
TOOL USING A PIEZO ACTUATOR 122
REPLACEABLE FRICTION COUPLING FOR PIEZOELECTRIC MOTORS 122
SEALING ELEMENT FOR THE PIEZO ACTUATOR OF A FUEL INJECTION VALVE 123
PIEZOELECTRIC DIAPHRAGM STRUCTURE WITH OUTER EDGE ELECTRODE 123
MINIATURE AUTO-FOCUS PIEZO ACTUATOR SYSTEM 123
RADIALLY POLED PIEZOELECTRIC DIAPHRAGM STRUCTURES 124
METHOD FOR CONTROLLING A PIEZO-ACTUATED FUEL-INJECTION VALVE 124
PIEZO ACTUATOR DRIVE CIRCUIT 125
PIEZOELECTRIC VALVE 125
PIEZOELECTRIC CERAMIC MATERIALS, BASED ON LEAD-ZIRCONATE-TITANATE (PZT), COMPRISING VALENCE-COMPENSATED COMPLEXES CONTAINING AG 125
PIEZOELECTRIC DEVICE FOR INJECTOR 126
INSULATION FOR PIEZOCERAMIC MULTILAYER ACTUATORS 126
PIEZOCERAMIC MULTILAYER ACTUATOR WITH A TRANSITION REGION BETWEEN THE ACTIVE REGION AND THE INACTIVE HEAD AND FOOT REGIONS 127
PIEZOACTIVE ACTUATOR WITH DAMPENED AMPLIFIED MOVEMENT 127
MONOLITHIC MULTILAYER ACTUATOR IN A HOUSING 128
MULTILAYER ACTUATOR WITH CONTACT SURFACES OF INTERNAL ELECTRODES OF THE SAME POLARITY ARRANGED OFFSET FOR THEIR EXTERNAL ELECTRODES 128
PIEZOELECTRIC DEVICE FOR INJECTOR 129
PIEZOELECTRIC MOTORS AND MOTOR DRIVING CONFIGURATIONS 129
PATENT ANALYSIS 129
TABLE 24  NUMBER OF U.S. PATENTS GRANTED TO COMPANIES IN THE ULTRASONIC MOTORS AND PIEZOELECTRIC ACTUATOR MARKETS FROM 2005 THROUGH 2009 130
FIGURE 14  TOP COMPANIES GRANTED U.S. PATENTS FOR ULTRASONIC MOTORS AND PIEZOELECTRIC ACTUATORS FROM 2005 THROUGH 2009 131
INTERNATIONAL OVERVIEW OF U.S. PATENT ACTIVITY IN PIEZOELECTRIC OPERATED ACTUATORS/ULTRASONIC MOTORS 132
TABLE 25  U.S. PATENTS GRANTED BY ASSIGNED COUNTRY/REGION FOR ULTRASONIC MOTORS AND PIEZOELECTRIC ACTUATORS FROM JANUARY 2005 TO 2009 132
COMPANY PROFILES 134
ADVANCED CERAMETRICS, INC. 134
APC INTERNATIONAL, LTD. 134
AUSTRIAMICROSYSTEMS USA, INC. 135
CEDRAT TECHNOLOGIES SA 135
CERAMTEC AG 136
CERATEC, INC. 136
CONTINENTAL AUTOMOTIVE GMBH 137
DELPHI WORLD AND NORTH AMERICAN HEADQUARTERS 137
DENSO CORPORATION 138
DISCOVERY TECHNOLOGY INTERNATIONAL 138
EDO CORPORATION, ELECTRO-CERAMIC PRODUCTS DIV 139
FAULHABER GROUP 139
FEINMESS DRESDEN GMBH 140
GALIL MOTION CONTROL 140
HEASON TECHNOLOGY LTD 141
MAD CITY LABS INC. 141
MICRO MECHATRONICS INC. 142
MICROMO ELECTRONICS, INC 143
MIDE TECHNOLOGY CORPORATION 143
MORGAN ELECTROCERAMICS LTD. 143
NPOINT 144
NANOMOTION LTD. 144
NEC TOKIN CORPORATION 145
NEW SCALE TECHNOLOGIES, INC. 145
NOLIAC A/S 146
PI CERAMIC GMBH 146
PIEZO SYSTEMS, INC. 147
PHYSIK INSTRUMENTE (PI) 147
PIEZOMOTOR AB 148
PIEZOSYSTEM JENA GMBH 149
PIEZOMECHANIK GMBH 149
PRIOR SCIENTIFIC, LTD. 150
QTECH NANOSYSTELS PTE LTD 150
ROBERT BOSCH LLC 150
SAMSUNG ELECTRO-MECHANICS CO., LTD. 151
SMART MATERIALS GMBH 151
SHINSEI CORPORATION 152
SEIKO INSTRUMENTS INC. (SII) 152
STAR MICRONICS 153
TEXAS INSTRUMENTS 153
TDK-EPC CORPORATION 154
ZYVEX 154