Electronics cleaning refers to the processes or steps that are employed to ensure that a semiconductor or other microelectronic device remains free from contaminants or other foreign materials that could have an adverse impact on its proper functioning and performance. New requirements are being placed on electronics cleaning technologies and products, because as device geometries continue to shrink and die sizes grow, microcontaminants such as particles, metallic impurities, and trace organic contaminants will have an ever-increasing detrimental impact on device yield and reliability.
 
Various other factors are contributing to the current dynamism of the electronics cleaning market. Process trends such as the movement to single-wafer processing pose new challenges for cleaning technology. Economic and environmental concerns are also causing users of electronics cleaning products to look for ways of reducing their chemicals consumption and substituting more environmentally benign chemicals for the harsh chemistries used in traditional “wet” process cleaning.
 
STUDY GOALS AND OBJECTIVES
 
In such a dynamic environment, technologies and markets for electronics cleaning are continually evolving. The goal of this updated study is to provide the reader with an understanding of recent developments in electronics cleaning applications, technologies, and products that will influence the future size and structure of the market for cleaning equipment and consumables.
 
Specific objectives include identifying segments of the electronics cleaning market with the greatest commercial potential in the near to mid-term (2010 to 2015), identifying and, where possible, quantifying the key demand drivers, projecting future demand for cleaning equipment and supplies, and evaluating the challenges that must be overcome for each segment to realize its potential.
 
INTENDED AUDIENCE
 
The report is intended especially for vendors of electronics cleaning equipment, chemicals, gasses and other consumables. Other readers who should find it particularly useful include entrepreneurs, investors, venture capitalists and other readers with a need to know where the electronics cleaning market is headed over the next 5 years.
 
The report should also be of interest to users of electronics cleaning products such as semiconductor manufacturers. Finally, members of technical and professional organizations such as the Semiconductor Industry Association should find the report useful.
 
SCOPE AND FORMAT
 
The report addresses the global market for electronics cleaning equipment, chemicals and other consumables, and cleaning-related services during the period from 2009 through 2015. It covers the entire range of products that are used to ensure that the wafer or other microelectronic device is free of contaminants and other unwanted foreign materials as it goes through the fabrication process, including:

•Cleaning equipment
•Solvents and other chemicals
•Gases
•Miscellaneous other consumables
•Engineering, management, and maintenance services related to cleaning equipment and supplies.


The report format includes the following major elements:

•Executive summary
•Technology trends
•Products and manufacturers
•Key patents and patent analysis
•Major applications in which electronics cleaning products are used (e.g., semiconductor, LCD display fabrication)
•Market drivers
•Global trends in the market for electronics cleaning products by technology, product type, application, and geographical region, 2009 to 2015
•Electronics cleaning product manufacturer market shares.

Highlights of the report:

•The global market for microelectronics cleaning equipment, consumables, and services was worth about $2.9 billion in 2009.  This figure is projected to reach $3.4 billion in 2010 and $8 billion by 2015, a compound annual growth rate (CAGR) of 18.5% between 2010 and 2015.

•Cleaning chemicals, gases and other consumables such as ultrapure water accounted for 62% of the market in 2009. This sector is worth an estimated $2.1 billion in 2010 and is expected to increase at a 19.1% compound annual growth rate (CAGR) to reach $5 billion in 2015.

•Equipment sales accounted for 29% of the total microelectronics cleaning equipment market in 2009. This sector is valued at an estimated $1 billion in 2010 and is expected to reach $2.4 billion in 2015, a compound annual growth rate (CAGR) of 19.1%.

TABLE OF CONTENTS

CHAPTER ONE: INTRODUCTION 
STUDY BACKGROUND  1
STUDY GOALS AND OBJECTIVES . 1
INTENDED AUDIENCE  2
SCOPE AND FORMAT  2
METHODOLOGY AND INFORMATION SOURCES . 3
ANALYST CREDENTIALS  3
DISCLAIMER

CHAPTER TWO: EXECUTIVE SUMMARY
SUMMARY TABLE GLOBAL SALES OF MICROELECTRONIC
CLEANING EQUIPMENT, SUPPLIES AND SERVICES SALES,
THROUGH 2015 ($ MILLIONS) . 5
SUMMARY FIGURE GLOBAL SALES OF MICROELECTRONIC
CLEANING EQUIPMENT, SUPPLIES AND SERVICES SALES,
2009-2015 ($ MILLIONS)

CHAPTER THREE: CLEANING PROCESS OVERVIEW
GENERAL DESCRIPTION  7
DEFINITIONS . 7
Cleaning . 7
Stripping  7
Ashing  7
Etching . 7
Front End of Line (FEOL) . 8
Back End of Line (BEOL)  8
HISTORICAL NOTE  8
IMPORTANCE OF CLEANING TO THE ELECTRONICS INDUSTRY . 9
GENERAL IMPORTANCE OF CLEANING  9
Device Processing Yield . 9
Device Performance . 10
Device Reliability . 10
TYPES OF CONTAMINATION  10
Particles . 10
Inorganic Chemicals  11
Organic Chemicals . 11
Dissolved Organics and Bacteria  11
SOURCES OF CONTAMINATION. 11
SPECIFIC APPLICATIONS . 12
INTEGRATED CIRCUITS  12
PHOTOMASKS  13
PRINTED CIRCUIT BOARDS  14
Removal of Flux Residues from PCB Assemblies after
Soldering . 14
Removal of Solder Paste or Adhesive from Stencils or
Misprints  15
HARD DISK DRIVES  15
Read/Write Heads  15
Storage Media  16
MEMS . 16
FLAT PANEL DISPLAYS 17
IMAGE SENSORS . 17
DEVELOPMENTS THAT MAY INFLUENCE MARKET FOR
CLEANING TECHNOLOGIES  17
SHRINKING FEATURE SIZES  17
NEW MATERIALS . 18
High-K Dielectrics . 18
New Salicides . 18
Copper  19
PROCESS-RELATED DEVELOPMENTS  19
Trend towards Single-Wafer Processing  19
Multiple-Use Tools . 20
ITRS . 20
TABLE 1 CLEANING PARAMETERS INFLUENCING DEVICE YIELD . 20
ITRS (Continued)  21

 CHAPTER FOUR: CLEANING TECHNOLOGIES, EQUIPMENT,
CHEMICALS AND SERVICES
SUMMARY  22
TECHNOLOGIES, EQUIPMENT, AND CHEMICALS  22
WET PROCESS CLEANING . 22
Technologies . 22
Wet Cleaning Systems  23
Batch Immersion Cleaning Systems  23
Batch Spray Cleaning Systems  23
Single-Wafer Immersion Systems  24
Single-Wafer Spray Systems . 24
Cleaning Chemistries . 25
RCA Cleaning Chemistry  25
Piranha . 26
Dilute Chemistries . 26
Aqueous and Semi-Aqueous Chemistries  27
Single-Wafer Cleaning Chemistries . 28
Dilute Sulfuric Peroxide, Plus (DSP+)  28
Applied Materials AM1  28
Dilute HF with Ozonated Water
(SCROD)  28
Direct Application of Gaseous Ozone  29
Aqueous Foam . 29
Ultrapure Water . 29
Reverse Osmosis Systems . 30
Deionization 30
Ion-Exchange Systems . 30
Electrodialysis/Electrodialysis-Reversal
(ED/EDR) Systems  31
Filtration . 31
Applications . 32
Semiconductor Manufacturing . 32
Current Applications . 32
Emerging Applications  33
Other Applications  33
Advantages and Disadvantages  34
Overall Advantages and Disadvantages of Wet
Cleaning . 34
Advantages and Disadvantages of Specific
Wet Cleaning Technologies . 35
Batch Immersion Systems . 35
Batch Spray Systems 36
Single-Wafer Immersion Systems . 36
Single-Wafer Spray Systems . 37
Products and Manufacturers  37
Wet Cleaning Equipment . 37
TABLE 2 WET CLEANING EQUIPMENT MANUFACTURERS . 38
FIGURE 1 GLOBAL WET CLEANING EQUIPMENT MARKET
SHARES, 2009 (%) . 38
Wet Cleaning Chemicals  39
TABLE 3 WET CLEANING CHEMICAL MANUFACTURERS  39
FIGURE 2 GLOBAL WET CLEANING CHEMICAL MARKET SHARES,
2009 (%)  40
Water Purification Systems  40
TABLE 4 WATER PURIFICATION EQUIPMENT MANUFACTURERS  41
FIGURE 3 GLOBAL ULTRAPURE WATER MARKET SHARES, 2009 (%)  42
Patent Analysis  42
FIGURE 4 U.S. PATENTS ISSUED SINCE 1976 RELATING TO WET
CLEANING TECHNOLOGIES (%) . 43
Wet Cleaning Equipment . 43
FIGURE 5 U.S. PATENTS ISSUED SINCE 1976 RELATING TO WET
CLEANING EQUIPMENT, BY TYPE OF EQUIPMENT* (%) . 44
TABLE 5 WET CLEANING EQUIPMENT IP PORTFOLIOS (NUMBER
OF U.S. WET CLEANING EQUIPMENT PATENTS)  45
Wet Cleaning Chemicals  45
FIGURE 6 U.S. PATENTS ISSUED SINCE 1976 RELATING TO WET
CLEANING CHEMICALS, BY TYPE OF CHEMICAL* (%) . 45
FIGURE 6 (CONTINUED) . 46
Ultrapure Water . 46
FIGURE 7 U.S. PATENTS ISSUED SINCE 1976 RELATING TO
ULTRAPURE WATER, BY TYPE OF PRODUCTION TECHNOLOGY*
(%) . 47
DRY PROCESS CLEANING . 47
Technologies . 47
Dry Cleaning Systems  48
Plasma Cleaning  48
FIGURE 8 TYPICAL (CAPACITIVE) RF PLASMA SYSTEM  48
Cryogenic Aerosol Cleaning  49
Laser Resist Stripping  49
Ultraviolet/Ozone Cleaning . 50
Dry Cleaning Gases  50
TABLE 6 DRY CLEANING GASES  50
Applications . 51
Advantages and Disadvantages  51
Products and Manufacturers  52
Equipment . 52
TABLE 7 DRY CLEANING EQUIPMENT MANUFACTURERS . 52
FIGURE 9 GLOBAL DRY CLEANING EQUIPMENT MARKET SHARES,
2009 (%)  53
Consumables . 53
TABLE 8 DRY CLEANING GAS MANUFACTURERS . 54
FIGURE 10 GLOBAL DRY CLEANING GAS MARKET SHARES, 2009
(%) . 54
FIGURE 10 (CONTINUED) . 55
Patent Analysis  55
FIGURE 11 U.S. PATENTS ISSUED SINCE 1976 AND PATENT
APPLICATIONS PENDING THAT RELATE TO DRY PROCESS
CLEANING (%)  55
FIGURE 11 (CONTINUED) . 56
EMERGING ELECTRONICS CLEANING TECHNOLOGIES . 56
Supercritical Co2 Process  56
Technology . 56
Applications . 57
Advantages and Disadvantages . 58
Manufacturers . 58
TABLE 9 SUPERCRITICAL CO2 CLEANING EQUIPMENT
MANUFACTURERS  58
Patent Analysis . 59
FIGURE 12 U.S. PATENTS ISSUED SINCE 1976 AND PENDING
PATENT APPLICATIONS RELATING TO SCCO2 CLEANING (%) . 59
FIGURE 12 (CONTINUED) . 60
Anhydrous SO3 Cleaning . 60
Technology . 60
Applications . 60
Advantages and Disadvantages . 61
Developers and Manufacturers  61
Patent Analysis . 61
FIGURE 13 U.S. PATENTS ISSUED SINCE 1976 AND PENDING
PATENT APPLICATIONS RELATING TO SO3 CLEANING (%)  61
FIGURE 13 (CONTINUED) . 62
Laser-Induced Shockwave Cleaning (LSC)  62
Technology . 62
Applications . 62
Advantages and Disadvantages . 63
Manufacturers . 63
Patent Analysis . 63
Other Technologies  63
Nanoprobe Cleaning . 63
New Cryogenic Aerosols . 63
Vapor Cleaning . 64
CONTAMINATION DETECTION TECHNOLOGIES . 64
TECHNOLOGY  64
TABLE 10 CONTAMINANT DETECTION AND CHARACTERIZATION
TECHNOLOGIES  65
Laser Backscattering . 65
Optical Microscopy  66
Other Technologies  66
ADVANTAGES AND DISADVANTAGES  66
TABLE 11 CONTAMINANT DETECTION AND CHARACTERIZATION
TECHNOLOGIES ADVNATAGES AND DISADVANTAGES  66
MANUFACTURERS  67
TABLE 12 MANUFACTURERS OF CONTAMINANT DETECTION
SYSTEMS  67
FIGURE 14 CONTAMINANT DETECTION SYSTEM MARKET
LEADERS, 2009 (PERCENT OF TOTAL SALES)  68
PATENT ANALYSIS  68
FIGURE 15 U.S. PATENTS ISSUED SINCE 1976 AND PENDING
PATENT APPLICATIONS RELATING TO CONTAMINATION
DETECTION SYSTEMS, BY TYPE OF TECHNOLOGY . 69
FIGURE 16 U.S. PATENTS ISSUED SINCE 1976 AND PENDING
PATENT APPLICATIONS RELATING TO CONTAMINATION
DETECTION SYSTEMS, BY ASSIGNEE (%)  70
CLEANING-RELATED CONTRACT SERVICES . 70
TABLE 13 COMPANIES PROVIDING OUTSOURCED
MICROELECTRONICS CLEANING SERVICES  71

CHAPTER FIVE: GLOBAL MARKET FOR ELECTRONICS CLEANING
EQUIPMENT, SUPPLIES AND SERVICES, 2009–2015
SUMMARY  72
OVERALL MARKET  72
TABLE 14 GLOBAL SALES OF MICROELECTRONIC CLEANING
EQUIPMENT, SUPPLIES AND SERVICES, THROUGH 2015 ($
MILLIONS)  72
FIGURE 17 MICROELECTRONIC CLEANING EQUIPMENT AND
SUPPLIES MARKET TRENDS, 2009–2015 ($ MILLIONS)  73
FIGURE 18 SALES OF MICROELECTRONICS CLEANING
EQUIPMENT VS. SUPPLIES MARKET BY TYPE OF PROCESS,
2009 AND 2015 (PERCENT OF GLOBAL ELECTRONICS CLEANING
SALES) . 74
MARKET BY TYPE OF TECHNOLOGY  75
FIGURE 19 MICROELECTRONICS CLEANING MARKET BY TYPE OF
PROCESS* (PERCENT OF GLOBAL ELECTRONICS CLEANING
SALES) . 75
MARKET BY TYPE OF APPLICATION  76
FIGURE 20 MICROELECTRONICS CLEANING MARKET BY TYPE OF
APPLICATION, 2009–2015 (PERCENT OF GLOBAL ELECTRONICS
CLEANING SALES)  76
MARKET BY REGION  77
FIGURE 21 MICROELECTRONICS CLEANING MARKET SHARES BY
REGION, 2009–2015  78
DETAILED ESTIMATES AND PROJECTIONS  79
WET PROCESS MARKET . 79
2009 Sales  79
FIGURE 22 GLOBAL SALES OF WET CLEANING EQUIPMENT,
CHEMICALS, AND ULTRAPURE WATER, 2009 (%/$ MILLION)  79
Equipment . 80
FIGURE 23 SALES OF WET CLEANING EQUIPMENT BY TYPE OF
EQUIPMENT, 2009 (%/$ MILLION) . 80
Chemicals  81
FIGURE 24 CONSUMPTION OF WET CLEANING CHEMICALS BY
TYPE OF CHEMICAL, 2009 ($ MILLIONS/%  81
Ultrapure Water . 82
Market Drivers  82
Trends in Global Semiconductor Production . 82
TABLE 15 GLOBAL SEMICONDUCTOR PRODUCTION, THROUGH
2015 ($ BILLIONS)  83
FIGURE 25 TRENDS IN GLOBAL SEMICONDUCTOR PRODUCTION,
2009–2015 ($ BILLION)  83
Growing Complexity of Semiconductors  84
FIGURE 26 TRENDS IN FEOL VS. BEOL CLEANING STEPS, 2009
AND 2015 (% OF ALL CLEANING STEPS)  84
Trend Towards 450 mm Wafers . 85
TABLE 16 SALES OF SINGLE WAFER CLEANING TOOLS, THROUGH
2015 ($ MILLIONS) . 86
FIGURE 27 TRENDS IN SALES OF SINGLE-WAFER CLEANING
EQUIPMENT, 2009–2015 . 86
New Interconnect Materials . 87
TABLE 17 SALES OF LOW-K DIELECTRIC MATERIALS USED IN
SEMICONDUCTOR PRODUCTION, THROUGH 2015 ($ MILLIONS)  87
FIGURE 28 TRENDS IN SALES OF LOW-K DIELECTRIC MATERIALS
USED IN SEMICONDUCTOR PRODUCTION, 2009-2015 ($
MILLIONS)  87
Diversification of Wet Cleaning Chemistry
Suppliers  88
Growing Importance of Non-Semiconductor
Applications . 88
FIGURE 29 TRENDS IN SEMICONDUCTOR VS. NONSEMICONDUCTOR
APPLICATIONS FOR WET CLEANING
EQUIPMENT, 2009 AND 2015 (%/$ BILLION)  88
Projected Market, 2010–2015 . 89
Summary . 89
TABLE 18 SALES OF WET PROCESS CLEANING EQUIPMENT AND
CHEMICALS, THROUGH 2015 ($ MILLIONS)  90
Equipment . 90
TABLE 19 SALES OF WET PROCESS CLEANING TOOLS, 2009–2015
($ MILLIONS)  90
TABLE 20 SALES OF WET PROCESS CLEANING CHEMISTRIES,
THROUGH 2015 ($ MILLIONS) . 91
FIGURE 30 TRENDS IN WET CLEAN EQUIPMENT MARKET
SHARES, 2009 AND 2015 (%) . 92
Chemicals  93
TABLE 21 SALES OF ULTRAPURE WATER, THROUGH 2015 ($
MILLIONS)  94
FIGURE 31 TRENDS IN WET CLEAN CHEMISTRY MARKET
SHARES, 2009–2015 (%) . 94
FIGURE 31 (CONTINUED) . 95
Ultrapure Water . 95
DRY PROCESS MARKET . 96
2009 Sales  96
FIGURE 32 GLOBAL SALES OF DRY CLEANING EQUIPMENT AND
CHEMICALS, 2009 ($ MILLIONS)  96
Equipment . 96
FIGURE 33 SALES OF DRY CLEANING EQUIPMENT BY TYPE OF
EQUIPMENT, 2009 ($ MILLIONS)  97
Gases . 98
FIGURE 34 CONSUMPTION OF DRY CLEANING GASES BY TYPE OF
GAS, 2009 ($ MILLIONS) . 98
Market Drivers  99
Overall Resist Consumption . 99
TABLE 22 SALES OF RESIST MATERIALS, THROUGH 2015 ($
MILLIONS)  100
FIGURE 35 TRENDS IN GLOBAL MARKET FOR RESIST
MATERIALS, 2009–2015 ($ MILLIONS) . 100
Use of New Resist and Semiconductor Materials  100
Overall Sales of Ozone Generation Systems  101
TABLE 23 SALES OF OZONE TECHNOLOGY, THROUGH 2015 ($
MILLIONS)  101
FIGURE 36 TRENDS IN GLOBAL MARKET FOR OZONE
TECHNOLOGY ($ MILLIONS)  102
Projected Market, 2010–2015 . 102
Summary . 102
TABLE 24 SALES OF DRY PROCESS CLEANING EQUIPMENT AND
GASES, 2009–2015 ($ MILLIONS)  102
Equipment . 103
TABLE 25 SALES OF DRY PROCESS CLEANING TOOLS, THROUGH
2015 ($ MILLIONS) . 103
Gases . 103
TABLE 26 SALES OF DRY CLEANING PROCESS GASES, THROUGH
2015 ($ MILLIONS) . 104
FIGURE 37 TRENDS IN DRY STRIP TECHNOLOGY MARKET
SHARES, 2009 AND 2015 (%) . 104
FIGURE 37 (CONTINUED) . 105
FIGURE 38 TRENDS IN DRY STRIP TECHNOLOGY MARKET
SHARES, 2009 AND 2015 (%) . 106
MARKETS FOR EMERGING CLEANING TECHNOLOGIES . 107
Supercritical Carbon Dioxide (SCCO2) . 107
2009 Sales . 107
Market Drivers  107
Trend towards Advanced and Next Generation
Lithography (NGL) Technologies  107
FIGURE 39 TRENDS IN SALES OF NGL VS. OTHER PHOT0RESIST
TYPES, 2009–2015 ($ MILLIONS)  108
FIGURE 39 (CONTINUED) . 109
Projected Market, 2010 to 2015  109
Equipment  109
TABLE 27 SALES OF SCCO2 CLEANING TOOLS, THROUGH 2015 ($
MILLIONS)  109
Carbon Dioxide . 109
TABLE 28 CARBON DIOXIDE CONSUMPTION BY SCCO2 CLEANING
TOOLS, THROUGH 2015 ($ MILLIONS)  110
Other Emerging Cleaning Technologies . 110
MARKETS FOR CLEANING-RELATED SERVICES . 110
2009 Sales  110
FIGURE 40 MARKET FOR CLEANING-RELATED SERVICES, 2009 (%)  111
Market Drivers  111
Semiconductor Industry Purchases of Outside
Services  111
FIGURE 41 RECENT TRENDS IN U.S. SEMICONDUCTOR INDUSTRY
PURCHASES OF SELECTED CONTRACT SERVICES, 1997-2007 ($
MILLIONS/PERCENT OF TOTAL SHIPMENT VALUE) . 112
Projected Market, 2010 to 2015  112
TABLE 29 SALES OF CLEANING-RELATED CONTRACT SERVICES,
THROUGH-2015 ($ MILLIONS)  113
MARKETS FOR CONTAMINANT DETECTION SYSTEMS  113
FIGURE 42 SEMICONDUCTOR AND OTHER MICROELECTRONICS
INSPECTION SYSTEM SALES, 2009 ($ MILLIONS) . 114
TABLE 30 SALES OF SEMICONDUCTOR AND OTHER
MICROELECTRONICS INSPECTION SYSTEMS, THROUGH 2015 ($
MILLIONS)  115
OTHER FACTORS THAT MAY INFLUENCE THE MARKET FOR
CLEANING EQUIPMENT AND SUPPLIES . 115
ENVIRONMENTAL, HEALTH AND SAFETY ISSUES . 115
Environmental, Health and Safety Issues Continued)  116
Environmental, Health and Safety Issues Continued)  117
Environmental, Health and Safety Issues Continued)  117

CHAPTER SIX: INDUSTRY STRUCTURE 
NUMBER/SIZE OF FIRMS  118
FIGURE 43 MICROELECTRONICS CLEANING EQUIPMENT
MANUFACTURERS BY ANNUAL SALES LEVEL, 2009 ($
MILLIONS/%) . 118
FIGURE 43 (CONTINUED) . 119
CLEANING PRODUCT SPECIALIZATION . 119
TABLE 31 MICROELECTRONICS CLEANING EQUIPMENT
MANUFACTURER SALES OF CLEANING EQUIPMENT VS. TOTAL
SALES ($ MILLIONS) . 119
FIGURE 44 MICROELECTRONICS CLEANING EQUIPMENT
MANUFACTURER SPECIALIZATION RATIOS, 2009 (CLEANING
EQUIPMENT SALES AS PERCENTAGE OF TOTAL SALES) . 120
NATIONALITY . 121
FIGURE 45 NATIONALITY OF MICROELECTONICS CLEANING
EQUIPMENT MANUFACTURERS (%) . 121
OWNERSHIP TRENDS . 122

CHAPTER SEVEN: VENDOR PROFILES
AIR PRODUCTS AND CHEMICALS, INC.  123
AKRION, INC.6330 HEDGEWOOD DRIVE, #150 . 123
APPLIED MATERIALS INC. . 123
ATMI INC  124
AUSTIN AMERICAN TECHNOLOGY  125
AXCELIS TECHNOLOGIES INC. . 125
AXIC INC. . 126
AZ ELECTRONIC MATERIALS  126
THE BOC GROUP PLC  126
CANON U.S., INC.  127
CYANTEC INC.  127
DONGJIN SEMICHEM KGIT 23RD FLOOR . 128
DONGWOO FINE CHEMICALS CO., LTD. . 128
DUPONT ELECTRONIC TECHNOLOGIES  129
EV GROUP  129
FMC INDUSTRIAL CHEMICALS . 129
FSI INTERNATIONAL INC  130
GENERAL CHEMICAL CORP. . 130
HITACHI LTD. . 130
HONEYWELL ELECTRONIC MATERIALS  131
JEOL LTD.  131
KANTO CORP.  131
KLA-TENCOR CORP.  132
L’AIR LIQUIDE SA. 132
LAM RESEARCH CORP. . 132
LEICA MICROSYSTEMS AG  133
LOTUS SYSTEMS GMBH . 133
MACDERMID, INC. . 133
MALLINCKRODT BAKER INC. . 133
MATHESON TRI-GAS, INC. . 134
MATTSON TECHNOLOGY, INC  134
MERCK KGA  134
MICELL TECHNOLOGIES, INC  135
MITSUBISHI CHEMICAL CORP 135
MKS INSTRUMENTS, INC . 136
NANOMETRICS, INC. . 136
NIKON CORP.  136
NOVASCAN TECHNOLOGIES, INC. . 137
NOVELLUS SYSTEMS, INC.  137
OLYMPUS CORP.  137
OSRAM SYLVANIA INC. . 138
PENTAGON TECHNOLOGIES INC.  138
PRAXAIR, INC. . 139
PSK, INC.  139
QUANTUMCLEAN, INC. . 139
RD CHEMICAL. 140
ROHM AND HAAS COMPANY . 140
SAMCO, INC.  140
SHIBAURA MECHATRONICS CORP. . 141
SOLVAY S.A.  141
STOELTING . 141
SUMITOMO CHEMICAL CO. LTD.  142
SÜSS MICROTEC AG  142
TOYO NIPPON SANSO CORP. . 142
TEPLA AG  143
TOKYO ELECTRON LTD. . 143
TOKYO OHKA KOGYO CO., LTD.  144
WAKO PURE CHEMICAL INDUSTRIES, LTD.  144
ZESTRON CORP.  144