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This report provides business and technical information on sputter targets as used for semiconductor devices. Also included is information on supply chain / availability issues. Market forecasts and market share statistics are provided.
TABLE OF CONTENTS
1 HIGHLIGHTS
1.1 Sputtering Target Market . 6
1.2 Supply Issues . 8
1.3 Technical Trends and Issues 9
2 INTRODUCTION
3 SPUTTERING TARGET MARKET
4 SUPPLIER STATUS
4.1 Honeywell Electronics Materials (HEM) 14
4.2 JX Nikko Mining & Metals (previously Nikko Materials) 16
4.3 Praxair-MRC . 18
4.4 Tosoh SMD . 20
5 PURE MATERIAL SUPPLIERS / REFINERS OF ORE
5.1 Metal Purity 22
6 METAL ORE SUPPLIERS
7 TANTALUM SOURCE AND SUPPLY
7.1 Tantalum Powder Supply Issues History/Background . 24
7.2 Tantalum Ore . 26
7.3 Tantalum Plate suppliers 27
7.4 Tantalum Sputtering Target Market 27
8 TITANIUM SOURCE AND SUPPLY
8.1 Titanium Consumption by Application . 30
9 TUNGSTEN SOURCE AND SUPPLY
10 COPPER SUPPLY ISSUES
11 RUTHENIUM SUPPLY AND DEMAND
12 RECYCLING
13 TECHNICAL TRENDS AND ISSUES
13.1 Barrier Technology for Copper Wiring . 39
13.2 Ruthenium . 40
13.3 Silicides: Cobalt Silicide and Nickel Alloy Silicides . 41
13.4 Silicides: Nickel Silicide 42
14 FUTURE MARKETS -- SOLAR CELLS AND THIN FILM TRANSISTORS
APPENDIX A: CHINA'S GROWING INFLUENCE ON THE METALS MARKETS 46
APPENDIX B: TANTALUM APPLICATIONS 48
APPENDIX C: ALUMINUM TARGET MANUFACTURING FLOW . 50
APPENDIX D: TITANIUM TUNGSTEN (TIW) TARGET MANUFACTURING FLOW . 51
APPENDIX E: TITANIUM TARGET MANUFACTURING FLOW 52
APPENDIX F: PROCESS FLOW FOR PURIFYING TITANIUM . 53
APPENDIX G: PROCESS FLOW FOR PURIFYING TANTALUM . 54
APPENDIX H: TANTALUM SHORTAGE OF 2000 55
APPENDIX I: 2006/2007 TECHNICAL TRENDS . 56
LIST OF FIGURES
Figure 1: Sputter Target Revenues for ICs, History and Forecast 7
Figure 2: Sputtering Target Supply Chain 10
Figure 3: Sputtering Target Revenues History and Forecast 11
Figure 4: 2010 and 2015 Semiconductor Sputtering Target Type as a
Percentage of Worldwide Revenue . 12
Figure 6: 2010 Estimated Worldwide Revenue by Region . 13
Figure 7: Praxair AdvanTageTM Tantalum Targets - Uniform Microstructure . 19
Figure 8: Tantalum Supply Chain . 24
Figure 9: Worldwide Tantalum Ore Mines 2000 and 2010 Estimate
Source USGS 26
Figure 12: Tantalum Sputtering Target Revenues and Forecast 28
Figure 13: Titanium Sponge Production Capacity by Country 2008 & 2012
Source USGS 29
Figure 14: Titanium Supply Chain -- Ore to Targets. 29
Figure 15: Tungsten Mining by Percentage of Worldwide Production . 32
Figure 17: Copper Ore Mining Production 2010 33
Figure 18: China's Net Import of Copper 2005-09 34
Figure 19: The Rising Price of Copper . 35
Figure 20: Ruthenium Pricing End of 2009 37
Figure 21: Precious Metals (Ruthenium) Mining Production (from USGS) . 37
Figure 22: Ruthenium Sputtering Target Supply Chain . 38
Figure B1: 2005/06 Tantalum Applications as a Percent of Total Volume by
Weight. 48
Figure I1: Comparison of Traditional vs. ECAE Target Surface Roughness 56
LIST OF TABLES
Table 1: HEM -- Manufacturing sites 16
Table 2: Alta Group of HEM (Honeywell) -- Manufacturing sites 16
Table 3: Nippon Mining & Metals Group -- Manufacturing Sites 18
Table 4: Praxair-MRC -- Manufacturing Sites . 20
Table 5: Tosoh SMD Manufacturing Sites 21
Table 6: Pure Material Suppliers . 21
Table 7: Metal Purities Currently Available 22
Table 8: Ta Mine Production (metric tons) 2008 to 2011 Estimate. 25
Table 9: Growing Titanium Content in Newer Planes 31
Table A1: The Five Stages of Industrialization . 47
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