The global CMP consumables market has resumed its growth trajectory prior to the 2008-2009 recession. At over $2.0B, 2013 CMP slurry and pad revenues are up 6.0% over 2012, and 2014 is projected to be up an additional 2.2%, according to a new report “CMP Consumables 2014 – A Critical Materials Report“. By 2019, the combined CMP pad and slurry market is expected to grow to $2.5B for a CAGR of 3.9% over this period.
The overall slurry market share of Cabot Microelectronics, the historical market leader, is estimated to be stable at just over 36% globally. Aside from Cabot, market ranking can be identified only in the context of a specific process application, as each segment functions as an independent market. This results in a highly fragmented slurry market with over a dozen suppliers, each with a significant market share in at least one process area. The pad market is still led by Dow Chemical with about two-thirds share globally. Cabot Microelectronics remains the only supplier clearly in the Tier 2 pad group with an estimated 9-10% share compared to 1-5% each for six others.
New product development continues to dominate the R&D budgets of slurry manufacturers as new device structures and material set combinations move into high volume chip manufacturing, including CMP processes related to FinFET and high-κ metal gate technologies. Defect reduction requirements and tighter specs on removal uniformity continue their relentless march to planarization perfection in order to satisfy the demands of device manufacturing below 20nm.
The 2014 CMP Consumables Report includes supply chain segments on Slurries and Abrasives; Pads; Slurry Filters; Pad Conditioners; Post-CMP Cleaning Chemicals; PVA Brushes; Equipment; Retaining Rings; and Support Services. Reports on Process Flows, University Research and a CMP retrospective comprise the remaining three segments. Each section, including the popular Slurry and Pad reports, can be purchased separately, with a discount for purchase of the entire set: