Silicon Equipment Components - A Critical Materials Report

Silicon Equipment Components - A Critical Materials Report

Techcet, Date of Publication: Nov 20, 2014, 45 Pages
US$4,279.00
TC5720

The Silicon Components Report focuses on silicon used for and with semiconductor and LED process equipment. Parts revenues by OEM tool set and regional shares are provided in addition to market growth forecast and fabricator market shares. Future requirements are discussed including a comparison with silicon carbide.

TABLE OF CONTENTS

SECTION 1. EXECUTIVE SUMMARY

SECTION 2. SILICON COMPONENTS FOR SEMICONDUCTOR MANUFACTURING

SECTION 3. SI COMPONENTS BY WAFER PROCESS TOOL TYPES

3-1. THERMAL PROCESSES 11
3-2. DRY ETCHING 12
3-3. PVD 13
3-4. CVD 14
3-5. ION IMPLANT 14
3-6. LITHOGRAPHY/WAFER INSPECTION/WAFER HANDLING 16

SECTION 4. MAJOR PROCESS COMPONENTS IN THE SI MARKET

4-1. WAFER BOATS AND TUBES, AND PADDLES 17
4.2. FOCUS RINGS AND OTHER DRY ETCHING SYSTEM COMPONENTS 19
4.3. MARKET STATUS OF SI COMPONENTS FOR THERMAL AND DRY ETCHING PROCESSES 21

SECTION 5. MATERIALS TO WATCH – SIFUSION & COLUMNAR CRYSTAL SILICON

5-1. SIFUSION FROM FERROTEC . 22
5-2. COLUMNAR CRYSTAL SILICON FROM MITSUBISHI MATERIALS 24

SECTION 6. GLOBAL SEMICONDUCTOR MARKET OVERVIEW

SECTION 7. WAFER FAB EQUIPMENT MARKET OVERVIEW

SECTION 8. SEMICONDUCTOR MATERIALS MARKET OVERVIEW

SECTION 9. SI COMPONENT MARKET OVERVIEW

9-1. ESTIMATED WORLD MARKET SHARE OF SI COMPONENTS BY SUPPLIERS 31
9-2. ESTIMATED WORLD MARKET SHARE OF SI COMPONENTS BY PROCESSES 31

SECTION 10. SI COMPONENT SUPPLIERS

10-1. SI SUPPLY CHAIN CHALLENGES 32
10-2. SI COMPONENT SUPPLIERS 33
10-3. MAJOR SI COMPONENT SUPPLIERS 35

SECTION 11. MARKET ANALYSIS

APPENDIX I. DISCOVERY OF SILICON (SI)


Figures

Figure 1-1. 2013 World Market Share Estimates of Si Component by Suppliers 5
Figure 2-1. Si Component Market Share by Semiconductor Manufacturing Process 8
Figure 3-1. Batch Systems Market Share 10
Figure 3-2: Single-Wafer Systems Market Share 11
Figure 3-3: Dry Etching Systems Market Share 11
Figure 3-4: PVD Systems Market Share 12
Figure 3-5: CVD Systems Market Share 13
Figure 3-6: Ion Implanter Systems Market Share 13
Figure 3-7: i-line Steppers Market Share 14
Figure 3-8: KrF/ArF Scanners Market Share 14
Figure 4-1: Si Wafer Boat 15
Figure 4-2: Thermal Process Component Materials (Qty) 16
Figure 4-3: Si Focus Ring . 17
Figure 4-4: Dry Etching System Component Materials (Qty) 18
Figure 5-1: World-Largest Round and Square Ingots in Semiconductor Grade 22
Figure 5-2: Columnar Crystal Silicon Plate Can be Tailored upon Customers’ Request 22
Figure 9-1: 2013 World Market Share Estimates of Si Component by Suppliers 29
Figure 9-2: 2013 World Market Share of Si Component By Processes 29

Tables

Table 2-1: Comparison between Silicon, Quartz, and SiC 10
Table 3-1: Wafer Process Tools and Their Si Components 11
Table 4-1: Replacement Cycle and Estimated Price of Focus Rings 17
Table 5-1: General Strength Comparison 21
Table 5-2: Product Material Comparison 21
Table 5-3: Applications of Columnar Crystal Silicon 23
Table 5-4: Comparison of Physical and Chemical Properties of Several Materials 24
Table 6-1: Semiconductor Market Overview 25
Table 7-1: Semiconductor Capital Equipment Market by World Region (2012-2013) 26
Table 7-2: Worldwide Wafer Fab Equipment Spending Forecast, 2013-2018 26
Table 8-1: 2012-2013 Semiconductor Materials Market by World Region 27
Table 9-1: Si Component Market Size, 2012-2015 28
Table 10-1: Major Si Component Suppliers 31
Table 10-2: Major Si Ingot Manufacturers/Suppliers 31

Date of Publication:
Nov 20, 2014
File Format:
PDF via E-mail
Number of Pages:
45 Pages
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